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http://dx.doi.org/10.7464/ksct.2017.23.2.181

The Development of Scrubber for F-gas Reduction from Electronic Industry Using Pressure Swing Adsorption Method and Porous Media Combustion Method  

Chung, Jong Kook (Global Standard Technology)
Lee, Ki Yong (Global Standard Technology)
Lee, Sang Gon (Global Standard Technology)
Lee, Eun Mi (Global Standard Technology)
Mo, Sun Hee (Global Standard Technology)
Lee, Dae Keun (Global Standard Technology)
Kim, Seung Gon (Korea Institute of Energy Research)
Publication Information
Clean Technology / v.23, no.2, 2017 , pp. 181-187 More about this Journal
Abstract
The perfluorocompounds (PFCs) emitted from the semiconductor and display manufacture is treated by abatement systems which use various technologies, such as combustion, thermal, plasma, catalyst. However, it is required that the system should overcome their drawbacks with excess energy consumption and low removal efficiency. The new technology using combination of pressure swing adsorption and excess enthalpy combustion for the reduction of PFCs emissions were developed and analyzed its characteristics. PFCs concentration ratio and PFCs loss factor were calculated from measuring concentration of PFCs at the calculated by comparing concentration of PFCs at the combustor's inlet and outlet. There were performance evaluations with various gas flow for comparing energy consumption and removal efficiency with existing equipments. The concentration ratio and the loss factor of PFCs were 1.65, 8.2%, respectively, when the total gas flow of the pressure swing absorption (PSA) inlet was 204 liter per minute (LPM) and $CF_4$ concentration was 1412 ppm. In comparison with existing system at constant condition, $CF_4$ removal efficiency for a porous media combustion (PMC) showed the improvement more than 16% and the consumed energy was also reduced up to approximately 41%. Then, the total gas flow introduced into PMC and $CF_4$ concentration were 91-LPM and 2335 ppm, respectively, and the destruction and removal efficiency of $CF_4$ was about 96% at 19-LPM $CH_4$, and 40-LPM $O_2$.
Keywords
Perfluorocompounds; Pressure swing adsorption; Porous media combustion; Destruction and removal efficiency;
Citations & Related Records
Times Cited By KSCI : 2  (Citation Analysis)
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