1 |
Bansal, R. C., and Goyal, M. Activated Carbon Adsorption, Taylor & Francis, Boca Raton, FL, 2005, pp. 243-292.
|
2 |
Ahn, N. G., Kang, S. W., Min, B. H., and Suh, S. S., "Adsorption Isotherms of Tetrafluoromethane and Hexafluoroethane on Various Adsorbents," J. Chem. Eng. Data, 51, 451-456 (2006).
DOI
ScienceOn
|
3 |
Foder, M., Wimmer, R., Yang, J., and McCay, T., "Recovery of Perfluorocompounds (PFCs) from Semiconductor Manufacturing Processes Using a Membrane-based System," Electrochem. Soc. Proc., 99, 60-69 (1999).
|
4 |
Kowalczyk, P., and Holyst, R., "Efficient Adsorption of Super Greenhouse Gas (Tetrafluoromethane) in Carbon Nanotubes," Environ. Sci. Technol., 42, 2931-2936 (2008).
DOI
ScienceOn
|
5 |
Naik, V., Jain, A. K., Patten, K. O., and Wuebbles, D. J., "Consistent Sets of Atmospheric Lifetimes and Radioactive Forcings on Climate for CFC Replacements: HCFCs and HFCs," J. Geophysical Res., 105(D5), 6904-6914 (2000).
|
6 |
Yang, R. T., Adsorbents: Fundamentals and Applications, A John Wiley & Sons, Inc., Hoboken, New Jersey, 2003, pp. 303-305.
|
7 |
Lashof, D. A., and Ahuja, D. R., "Relative Contributions of Greenhouse Gas Emissions to Global Warming," Nature, 344, 529-531 (1990).
DOI
|
8 |
Sekiya, A., and Okamoto, S, "Evaluation of Carbon Dioxide Equivalent Values for Greenhouse Gases: CEWN as a New Indicator Replacing GWP," J. Fluorine Chem., 131(2), 364-368 (2010).
DOI
ScienceOn
|
9 |
Pulselli, F. M. "Global Warming Potential and the Net Carbon Balance," Encyclopedia of Ecology, Elsevier, 2008, pp. 1741-1746.
|
10 |
Tanada, S., Kawasaki, N., Nakamura, T., Ohue, T., and Abe, I., "Adsorbability of 1,1,1,2-tetrafluoroethane (HFC 134a) onto Plasma-treated Activated Carbon in and ," J. Colloid Interface Sci., 191, 337-340 (1997).
DOI
ScienceOn
|
11 |
Van Hoeymissen, J. A. B., Daniels, M., Anderson, N., Fyen, W., and Heyns, M., "Gas Stream Analysis and PFC Recovery in a Semiconductor Process," Mat. Res. Soc. Symp. Proc., 447, 55-60 (1997).
|
12 |
Lucas, P. L., van Vuuren, D. P., OlivierJ. G. J., and den Elzen, M. G. J., "Long-term Reduction Potential of Non- Greenhouse Gases," Environ. Sci. Policy, 10(2), 85-103 (2007).
DOI
ScienceOn
|
13 |
Johnson, A. D., Entley, W. R., and Maroulis, P. J., "Reducing PFC Gas Emissions from CVD Chamber Cleaning," Solid State Technol., 43, 103-114 (2000).
|
14 |
Tsai, W. T., Chen, H. P., and Hsien, W. Y., "A Review of Uses, Environmental Hazards and Recovery/recycle Technologies of Perfluorocarbons (PFCs) Emissions from the Semiconductor Manufacturing Processes," J. Loss Prev. Process Ind., 15, 65-75 (2002).
DOI
ScienceOn
|
15 |
Chang, M. B., and Lee, H. M., "Abatement of Perfluorocarbons with Combined Plasma Catalysis in Atmospheric-pressure Environment," Catal. Today, 89(1), 109-115 (2004).
DOI
ScienceOn
|
16 |
Brown, R. S., and Rossin, J. A., "Catalytic Technology for PFC Emissions Control," Solid State Technol., 44(7), 189 (2001).
|
17 |
Streif, T., DePinto, G., Dunnigan, S., and Atherton, A., "PFC Reduction through Process and Hardware Optimization," Semiconductor International, 20(June), pp. 129-134 (1997).
|
18 |
Chiarello, R, "ESH issues make progress," Semiconductor International, 24(March), 81-88 (2001).
|
19 |
Sikdar, S. K., Burckle, J., and Rogut, J., "Separation Methods for Environmental Technologies," Environ. Prog., 20(1), 1-11 (2001).
DOI
ScienceOn
|
20 |
Muller, E. A., "Adsorption of Super Greenhouse Gases on Microporous Carbons," Environ. Sci. Technol., 39, 8736-8741 (2005).
DOI
ScienceOn
|
21 |
Dutta, P. K., and Radner R., "A Strategic Analysis of Global Warming: Theory and Some Numbers," J. Economic Behavior Organization, 71(2), 187-209 (2009).
DOI
ScienceOn
|
22 |
Herzog, F., "Solvent Recovery and Waste Gas Purification with Cryogenic Processes," Studies Environ. Sci., 61, 309-319 (1994).
DOI
|