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http://dx.doi.org/10.7464/ksct.2010.16.1.064

Application of a Divided-Wall Column for the Trichlorosilane Refining Process  

Hong, Seung-Taek (School of Display and Chemical Engineering, Yeungnam University)
Lee, Moon-Yong (School of Display and Chemical Engineering, Yeungnam University)
Publication Information
Clean Technology / v.16, no.1, 2010 , pp. 64-70 More about this Journal
Abstract
In this study, we suggest the application of the divided-wall column (DWC) to the existing trichlorosilane(TCS) purification process in the commercial polysilicon manufacturing process. Using Aspen HYSYS V7.1, an extensive simulation study was carried out for the analysis of the energy consumptions and capital cost for the conventional sequential distillation configuration and the DWC for producing a given purity and yield of trichlorosilane. As a result, it is shown that the DWC saves the separation energy by 61% and the equipment cost by 58% compared with the conventional distillation process.
Keywords
Trichlorosilane; Refining process; Distillation process; Divided-wall column;
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Times Cited By KSCI : 1  (Citation Analysis)
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