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http://dx.doi.org/10.7742/jksr.2010.4.3.027

Design and Fabrication of Hard X-ray Zone Plate  

Chon, Kwon-Su (Department of Radiological Science, Catholic University of Daegu)
Publication Information
Journal of the Korean Society of Radiology / v.4, no.3, 2010 , pp. 27-31 More about this Journal
Abstract
Spatial resolution is determined by the performance of x-ray optics used in the x-ray imaging system. A zone plate was designed for obtaining a high spatial resolution image at x-ray energy of 8.5keV. A spatial resolution of 80 nm was estimated by the ray tracing when an x-ray tube of tungsten targe was used instead of synchrotron radiation. The designed zone plate of outermost zone width of 40nm was successfully fabricated by the electron-beam lithography.
Keywords
Hard x-ray; Zone plate; Spatial resolution; Electron-beam lithography;
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