Browse > Article

Measurement of Thickness Distribution of $Si_3N_4$ Membrane Using Phase-Shifting Interferometer  

Lee, Jung-Hyun (Department of Physics, Pohang University of Science and Technology)
Jeong, Seung-Jun (Department of Physics, Pohang University of Science and Technology)
Kang, Jeon-Woong (Department of Physics, Pohang University of Science and Technology)
Jeon, Yun-Seong (Department of Physics, Pohang University of Science and Technology)
Hong, Chung-Ki (Department of Physics, Pohang University of Science and Technology)
Publication Information
Journal of the Korean Society for Nondestructive Testing / v.25, no.2, 2005 , pp. 67-73 More about this Journal
Abstract
The thickness of a Si3N4 thin film with a 100m nominal thickness was measured by use of a Mach-Zehnder interferometer. The map of the phase-delay through the thin film was obtained by an interframe intensity-correlation-matrix method that could elliminate phase-shifting errors. After the spatial phase-shifting errors were treated with a least-squares method, the reference to surface of the phase map was estimated. The overall accuracy of the method was found to be 5nm.
Keywords
phase-shifting interferometer; phase map; thin film; thickness measurement;
Citations & Related Records
연도 인용수 순위
  • Reference
1 Accelerated phase measuring interferometry by least square for phase shifting interferometry /
[ Kim, S.W.;Kang, M.G.;Han, G.S. ] / Optical Engineering   DOI
2 Inter frame intensity correlation matrix method for self-calibration in phase shifting interferometry /
[ Yun, H.Y.;Hong, C.K. ] / Applied Optics
3 General algorithm of phase shifting interferometry by iterative least square fitting /
[ Kong, I.B.;Kim, S.W. ] / Optical Engineering   DOI   ScienceOn
4 Installation et utillisation du compateur photoelectrique et interferential du Bureau International des Poids et mesures /
[ Carre, P. ] / Metrologia   DOI
5 Digital wavefront measuring interferometry for testing optical surfaces and lenses /
[ Buruning, J.;Herriott, D.R.;Gallagher, J.E.;Rosenfeld, D.P.;White, D.A.;Brangaccio, D.J. ] / Applied Optics   DOI
6 Fourier decription of digital phase mesurment phase-measuring interferometry /
[ Freischlad, K.;Koliopoulos, C.L. ] / Journal of the Optical Society of America   DOI
7 Phase shifting speckle interferometry /
[ Greath, K. ] / Applied Optics   DOI
8 Phase shifting digital holography /
[ Yamaguchi, I.;Zhang, T. ] / Optics Letters   DOI
9 Three-dimensional microscopy with phse shifting digital holography /
[ Zhang, T.;Yamaguchi, I. ] / Optics Letters   DOI
10 digital wave front measuring interferometry: some systematic error sources /
[ Schwider, J.;Burow, R.;Elssner, K.E.;Grnznna, J.;Spolaczyk, R.;Merkel, K. ] / Applied Optics   DOI
11 Simultaneous calculation of phase distribution and scanning phase in phase shifting interferometry /
[ Okada, K.;Sato, A.;Tsujiuchi, J. ] / Optics Communications   DOI