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http://dx.doi.org/10.5916/jkosme.2007.31.4.377

A Study on Gamma TiAl Micro-structural Fracture with EBSD Technique  

Kim, Yun-Hae (한국해양대학교 기계소재공학부)
Woo, Byung-Hoon (한국해양대학교 대학원 재료공학과)
Bae, Chang-Won (한국해양수산연수원)
Bae, Sung-Yeol (한국해양대학교 대학원 재료공학과)
Higo, Yakichi (동경공업대학)
Moon, Kyung-Man (한국해양대학교 기계소재공학부)
Abstract
A backscatter Kikuchi diffraction attachment to an SEM enables the convenient investigation of grain orientations on bulk or micro surface. Their relation to micro structural features gives insight into many aspects of anisotropic materials properties. In micro area such as Micro Electro Mechanical Systems(MEMS) devices is required in order to improve understanding of how they may be expected to perform upon the micro scale. Electro Back Scatter Diffraction (EBSD) helps us to find uniform area as MEMS material. The ${\gamma}-TiAl$ has two different lamellar structures ${\gamma}/{\alpha}2-Ti_3Al$ phase which have shows $\{111\}{\gamma}//\{0001\}{\alpha}2$ plane indexing. The micro size testing specimen was successfully made by this structural relation. Interlamellar structure specimen averagely show $20{\sim}25%$ lower fracture toughness value compare with translamellar specimens Moreover micro fracture surface and micro crack progress were observed.
Keywords
EBSD(Electro Back Scatter Diffraction); MEMS(Micro Electro Mechanical System); Interlamellar; Translamellar; FIB;
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