Browse > Article
http://dx.doi.org/10.5916/jkosme.2007.31.3.272

Numerical Simulation of Gaseous Flow in Microchannel  

Islam, Md. Tajul (Graduate School of Mechanical Engineering, Pukyong National University)
Lee, Jong-Hoon (Graduate School of Mechanical Engineering, Pukyong National University)
Lee, Yeon-Won (School of Mechanical Engineering, Pukyong National University)
Publication Information
Journal of Advanced Marine Engineering and Technology / v.31, no.3, 2007 , pp. 272-281 More about this Journal
Abstract
A numerical simulation on nitrogen gas flow in a long parallel plate microchannel was performed to obtain the effect of compressibility and rarefaction on gaseous flow in microchannels. The simulation was based on steady. two dimensional compressible Navier-Stokes and energy equations with noslip and first order slip boundary conditions. The channel was $1.2{\mu}m$ deep and $3000{\mu}m$ long. The Reynolds numbers were in the range of order from $10^{-2}$ to $10^{-1}$. So the flow was assumed to be laminar. The computations were performed on various pressure ratios. The outlet pressure was fixed to atmospheric pressure. The outlet Knudsen number was 0.0585, consequently the flow was in the slip flow regime. The computations were performed with the assumption of isothermal channel walls. The results were compared with the experimental data. The agreement was good.
Keywords
Knudsen number; Mean free path; Rarefaction effect; Compressibility;
Citations & Related Records
연도 인용수 순위
  • Reference
1 John C. Harley, Yufeng Huang, Haim H. Bau and Jay N. Zamel, 'Gas flow in micro-channels', J. Fluid Mech., vol. 284 (1995), pp. 257-274   DOI   ScienceOn
2 Ali Beskok and George E. Karniadakis, 'Simulation of heat and momentum transfer in complex microgeometries', Journal of Thermophysics and Heat Transfer, vol. 8, No. 4 (1994), pp. 647-655   DOI   ScienceOn
3 Yutaka Asako, and Harumi Toriyama,'Heat transfer characteristics of gaseous flows in microchannels', Microscale Thermophysical Engineering, vol. 9 (2005), pp. 15-31   DOI   ScienceOn
4 Yan Ji, Kun Yuan, J. N. Chung, 'Numerical simulation of wall roughness on gaseous flow and heat transfer in a microchannel', Internaltional journal of heat and mass transfer, vol. 49 (2006), pp. 1329-1339   DOI   ScienceOn
5 S. B. Choi, R. F. Barron and R. O. Warrington, Fluid flow and heat transfer in microtubes, in; Micromechanical Sensors, Actuators, and Systems, ASME DSC-vol. 32, (1991), pp. 123-134
6 H. R. Van den Berg, C. A. ten Seldam, and P. S. van der Gulik, 'Thermal effects in compressible viscous flow in a capillary', International Journal of thermophysics, vol 14, no 4 (1993), pp. 865-892   DOI
7 Gian Luca Morini, 'Viscous heating in liquid flows in micro-channels', International journal of heat and mass transfer, vol. 47 (2005), pp. 3637-3747
8 Errol B. Arkilic and Kenneth S. Breuer, Martin A. Schmidt, 'Gaseous flow in microchannels', FED-vol. 197 (1994), pp.57-66
9 Pong, K. C.; Ho, C.-M.; Liu, J.; Tai, Y. C., 'Non-Linear Pressure distribution in Uniform Microchannels', ASMEPublications-FED, v.197 (1994), pp. 51-56
10 M. Gad-el-Hak (Ed.), 'The MEMS Handbook', CRC press, New York, 2001
11 Ching-Shung Chen, 'The Analytical and Numerical Solutions for Gaseous Slip Flow in Micro-Channels', Journal of the Chinese institute of Engineers, vol.23, No. 2, pp. 229-235 (2000)   DOI
12 Yutaka Asako, Tianqi Pi, Stephen E. Turner, Mohammad Faghri, 'Effect of compressibility on gaseous flows in micro-channels', International Journal of Heat and Mass Transfer, vol. 46 (2003), pp. 30041-3050
13 G. E. Karniadakis, A. Beskok, 'Microflows, Fundamentals and Simulation', Springer-Verlag Newyork, 2002
14 R. K. Shah, A. L. London, 'Laminar flow forced convection in ducts', Academic press, New york, 1978
15 P. Wu and W. A. Little, 'Measurement of heat transfer characteristics of the gas flow in fine channel heat exchangers used for microminiature refrigerators', Cryogenics, vol. 24, (1984), pp. 415-420   DOI   ScienceOn
16 Errol B. Arkilic, martin A. Schmidt, and Kenneth S. Breuer, 'Gaseous slip flow in long microchannels', Journal of Microelectromechanical System, Vol. 6, No. 2 (1997), pp.167-178   DOI   ScienceOn
17 Patrick H. Oosthuizen, William E. Carscallen, 'COmplressible fluis flow', McGraw-Hill Book Co., 1997
18 G. L. Morini, M. Spiga, P. Tartarini, 'The rarefaction effect on the friction factor of gas flow in microchannels'', Supperlattices and Microstructures, vol. 35 (2004), pp. 587-599   DOI   ScienceOn