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Optimal Central Control of OHT(Overhead Hoist Transport) in Semiconductor Processing  

Oh Jin-Seok (한국해양대학교 선박전자기계공학부)
Kim Hak-Sun (한국해양대학교 선박전자기계공학부)
Publication Information
Journal of Advanced Marine Engineering and Technology / v.28, no.7, 2004 , pp. 1159-1164 More about this Journal
Abstract
There is an Overhead Hoist Transport(OHT) for delivering the wafer in semiconductor processing. The transfer system is consists of carrier vehicle. rail, and support. OHTCMS(OHT Control and Management System) has to take the feature, such as the optimal control and integration with several OHT. In this paper, ESRA(Efficiency of Shortest - Route Algorithms) is proposed which can be transported optimal route and be prevented collision using the Floyd-Warshall algorithms. The proposed algorithm is verified through consecutive simulation for a long time.
Keywords
Overhead Hoist; Semiconductor processing; Optimum central control; Optimal flow path;
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