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http://dx.doi.org/10.4150/KPMI.2018.25.2.144

Fabrication and Characterisitics of Al2O3-SiC Ceramic Composites for Electrostatic Discharge Safe Components  

Kim, Ha-Neul (Engineering Ceramics Research group, Korea Institute of Materials Science)
Oh, Hyun-Myung (Engineering Ceramics Research group, Korea Institute of Materials Science)
Park, Young-Jo (Engineering Ceramics Research group, Korea Institute of Materials Science)
Ko, Jae-Woong (Engineering Ceramics Research group, Korea Institute of Materials Science)
Lee, Hyun-Kwuon (Department of Materials Science and Engineering, Kumoh National Institute of Technology)
Publication Information
Journal of Powder Materials / v.25, no.2, 2018 , pp. 144-150 More about this Journal
Abstract
$Al_2O_3-SiC$ ceramic composites are produced using pressureless sintering, and their plasma resistance, electrical resistance, and mechanical properties are evaluated to confirm their applicability as electrostatic-discharge-safe components for semiconductor devices. Through the addition of Mg and Y nitrate sintering aids, it is confirmed that even if SiC content exceeded 10%, complete densification is possible by pressureless sintering. By the uniform distribution of SiC, the total grain growth is suppressed to about $1{\mu}m$; thus an $Al_2O_3-SiC$ sintered body with a high strength over 600 MPa is obtained. The optimum amount of SiC to satisfy all the desired properties of electrostatic-discharge-safe ceramic components is obtained by finding the correlation between the plasma resistance and the electrical resistivity as a function of SiC amount.
Keywords
$Al_2O_3$; SiC; Plasma resistance; Electric resistivity; Electrostatic discharge;
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