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http://dx.doi.org/10.4150/KPMI.2012.19.2.140

Manufacturing of Micro Gas Bearing by Fe-Ni Nanopowder and Metal Mold Using LIGA  

Son, Soo-Jung (Korea Institute of Materials Science)
Cho, Young-Sang (Korea Institute of Materials Science)
Kim, Dae-Jung (University of Texas at Arlington)
Kim, Jong-Hyun (Pohang Accelerator Laboratory)
Chang, Suk-Sang (Pohang Accelerator Laboratory)
Choi, Chul-Jin (Korea Institute of Materials Science)
Publication Information
Journal of Powder Materials / v.19, no.2, 2012 , pp. 140-145 More about this Journal
Abstract
This paper describes the manufacturing process of tilting pad gas bearing with a diameter of 5 mm and a length of 0.5-1 mm for power MEMS (Micro Electomechanical Systems) applications. The bearing compacts with nanopowder feedstock were prepared by Ni-metal mold with 2-mold system using LIGA process. The effect of the manufacturing conditions on sintering properties of nanopowder gas bearing was investigated. In this work, Fe-45 wt%Ni nanopowder with an average diameter of 30-50 nm size was used as starting material. After mixing the nanopowder and the wax-based binders, the amount of powder was controlled to obtain the certain mixing ratio. The nanopowder bearing compacts were sintered with 1-2 hr holding time under hydrogen atmospheres and under temperatures of $600^{\circ}C$ to $1,000^{\circ}C$. Finally, the critical batch of mixed powder system was found to be 70% particle fraction in total volume. The maximum density of the sintered bearing specimen was about 94% of theoretical density.
Keywords
Micro bearing; Fe-Ni nanopowder; Wax-based binder system; LIGA process;
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Times Cited By KSCI : 1  (Citation Analysis)
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