Study on the Treatment of Hydrogen Chloride Gas used in Semiconductor Process by using Gas Adsorption Agents such as Zeolite Resins, ZnO, and AgMnO3
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Park, Jeong-Jun
(Department of Chemistry, College of Natural Sciences)
Lim, H.B. (Department of Chemistry, College of Natural Sciences) Hwang, Cheong-Soo (Department of Chemistry, College of Natural Sciences) |
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Silver-catalysed MnO<SUB>2</SUB> as hydrogen absorber
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DOI ScienceOn |
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Studies of Gas Adsorption on ZnO Using ESR, FTIR Spectroscopy, and MHE (Microwave Hall Effect) Measurements
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DOI ScienceOn |
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CO<SUB>2</SUB> and NH<SUB>3</SUB> interaction with ZnO surface: An AM1 study
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DOI ScienceOn |
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Surface Wave Plasma Abatement of CHF<SUB>3</SUB> and CF<SUB>4</SUB> Containing Semiconductor Process Emissions
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Innovative Surface Wave Plasma Reactor Technique for PFC Abatement
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Adsorption Properties of Nitrogen Monoxide on Silver Ion-Exchanged Zeolites
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DOI ScienceOn |
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DOI |
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Influence of Ag Content and H<SUB>2</SUB>S Exposure on 1,3-Butadiene/1-Butene Adsorption by Ag Ion-Exchanged Y-Zeolites (Ag−Y)
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DOI ScienceOn |
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FTIR in situ studies of the gas phase reactions in chemical vapor deposition of SiC
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DOI ScienceOn |
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DOI |
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