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Study for Conductive and Non-conductive Multi-layers Depth Profiling Analysis of Radio Frequency Gas-jet Boosted Glow Discharge Spectrometry  

Cho, Won Bo (Institute of development , High integrated technology Inc.)
Borden, Stuart (Institute of development , High integrated technology Inc.)
Jeong, Jong Pil (Institute of development , High integrated technology Inc.)
Kang, Won Kyu (Institute of development , High integrated technology Inc.)
Kim, Kyu Whan (Institute of development , High integrated technology Inc.)
Kim, Hyo Jin (College of pharmacy, Dongduk women's university)
Publication Information
Analytical Science and Technology / v.15, no.2, 2002 , pp. 108-114 More about this Journal
Abstract
The new system using a glow discharge atomic emission spectrometer for the direct analysis of solid samples has been developed and characterized. The system was consisted of new glow discharge cell improved previous gas-jet boosted nozzle and radio-frequency power supply. In the case of previous type glow discharge chamber, it had been fitted trace analysis of low alloy steel with low discharge power, because it was to decrease redeposition and increase sample weight loss. But it had a problem that plasma becomes unstale due to increased sample weight loss and redeposition resulting from the high discharge power. Because of being problem of previous glow discharge, it is impossible to analyze using high power. The modified gas-jet boosted glow discharge to solve this problem would improve to be less sample loss rate of modified nozzle than sample loss rate of previous nozzle on the equal discharge condition, and improve to increase stability of plasma. The effect of discharge parameters such as discharge pressure, gas flow rate and power on the sample loss rate, emission intensity has been studied to find optimum discharge conditions. The calibration curves of Fe were obtained with 3 low-alloy samples.
Keywords
modified gas jetting nozzle; radio-frequency; trace analysis;
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