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Study on Fluid Distribution in Slot-die Head Using CFD  

Yoo, Suho (School of Electrical, Electronic & Communication Engineering, Korea University of Technology and Education)
Kim, Gieun (School of Electrical, Electronic & Communication Engineering, Korea University of Technology and Education)
Shin, Youngkyun (School of Electrical, Electronic & Communication Engineering, Korea University of Technology and Education)
Park, Jongwoon (School of Electrical, Electronic & Communication Engineering, Korea University of Technology and Education)
Publication Information
Journal of the Semiconductor & Display Technology / v.21, no.4, 2022 , pp. 39-44 More about this Journal
Abstract
Using a CFD (computational fluid dynamics) simulation tool, we have offered a design guideline of a slot-die head having a simple T-shaped cavity through an analysis of the fluid dynamics in terms of cavity pressure and outlet velocity, which affect the uniformity of coated thin films. We have visualized the fluid flow with a transparent slot-die head where poly(3,4-ethylenedioxythiophene):poly(4-styrenesulfonate) (PEDOT:PSS) is injected. We have shown that the fluid dynamics inside the slot-die head depends sensitively on the cavity depth, cavity length, land length, and channel gap (i.e., shim thickness). Of those, the channel gap is the most critical parameter that determines the uniformity of the pressure and velocity distributions. A pressure drop inside the cavity is shown to be reduced with decreasing shim thickness. To quantify it, we have also calculated the coefficient of variation (CV). In accordance with Hagen-Poiseuille's laws and electron-hydraulic analogy, the CV value is decreased with increasing cavity depth, cavity length, and land length.
Keywords
Slot-die head; CFD simulation; Fluid dynamics; Pressure drop; Slot-die coating;
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Times Cited By KSCI : 1  (Citation Analysis)
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