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A study on the Width Measurement of Image Patterns Using Gaussian Interpolation  

Kim, Gyung Bum (Aeronautical & Mechanical Design Engineering, Korea National University of Transportation)
Publication Information
Journal of the Semiconductor & Display Technology / v.21, no.3, 2022 , pp. 12-16 More about this Journal
Abstract
In this paper, a method for measuring image pattern widths is proposed using gaussian interpolation, in order to improve inconsistent results coming from the different directions in image patterns. The performance of our method is evaluated using image patterns with 9 directions, and compared with previous methods. It is confirmed that the proposed method gives accurate and consistent width results regardless of pattern directions.
Keywords
Automated inspection; Gaussian interpolation; Pattern measurement; Sub-pixel position;
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Times Cited By KSCI : 1  (Citation Analysis)
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