GaN Etch Process System using Parallel Plasma Source for Micro LED Chip Fabrication
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Son, Boseong
(Department of Electronic Engineering, Yeungnam University)
Kong, Dae-Young (Ultech Co., Ltd.) Lee, Young-Woong (Department of Electronic Engineering, Yeungnam University) Kim, Huijin (Department of Electronic Engineering, Yeungnam University) Park, Si-Hyun (Department of Electronic Engineering, Yeungnam University) |
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