Browse > Article

A Study on Improvement of Heater Rod Adhesion in Semiconductor Equipment  

Wang, Hyun-Chul (School of Electrical, Electronics and Communication Engineering Korea University of Technology and Education)
Seo, Hwa-Il (School of Electrical, Electronics and Communication Engineering Korea University of Technology and Education)
Publication Information
Journal of the Semiconductor & Display Technology / v.19, no.1, 2020 , pp. 67-72 More about this Journal
Abstract
This study analyzes the method of adhesion and improvement between heat.er and RF filter in PE-CVD equipment through TRIZ method and proposes a solution. TRIZ Solution such as function analysis, 9-window matrix, ASIT, and Root cause analysis were used. The contact temperature between the heater and the RF filter was 20% and the surface temperature was lowered to 5.7℃, suggesting an improvement method for the thermal expansion of the PE-CVD equipment hot zone.
Keywords
PE-CVD; Semiconductor Equipment; TRIZ; RF Filter; AlN Heater;
Citations & Related Records
Times Cited By KSCI : 2  (Citation Analysis)
연도 인용수 순위
1 Wan-Shick Hong, "Thin Film Vacuum Process Technology via Chemical Vapor Deposition Methods", Vacuum magazine of Korea Vacuum Society, Vol.1-3, pp. 9-13, 2014.   DOI
2 Hyun-Chul Wang, Hwa-il Seo, "High-Impedance Filter for Improving the Efficiency of PE-CVD Equipment" 2018 IEIE Summer conference, Vol. 2018, No.6, pp.154-156, 2018.
3 Yong-Jeong Huh, Seong Do Hong, Sa Hwan Leem, "The Development of Intellectual Solar Green Street Lighting using Q-TRIZ", J. of the Semiconductor & Display Technology, Vol. 10, No. 3, pp. 43-47, 2011.
4 Ho-Jong Kim, "TRIZ creativity" J. of the semiconductor & display technology, Vol.4 No.4, pp.33-40, 2005.
5 Edoardo Rovida, Marco Bertoni and Marina Carulli, "about the use of TRIZ for product service development", International conference on engineering design, ICED'09, pp.262, 2009.
6 Song-Yeon Lee, Yong Jeong Huh, "A Study on Problem Solving of 3D Printing Production of Scaffold Using ADRIGE TRIZ Algorithm and DOE", J. of the semiconductor & display technology, Vol. 18 No.2, pp.92-97, 2019.
7 Eun-Gyung Kim, "Inventive Problem Solving using IFR", Asia-pacific journal of Multimedia Services Convergent with Art, Humanities, and Sociology, Vol.6 No.9, pp.473-481, 2016.
8 Gun Lee, Hyun-Chul Lee, Seong-Seok Go, "A Study on the Optimum Selection of Decision Making to the Analysis Stage ofe Desing VE using ASIT", J. of the Architectural Institute of Korea Structure & Construction, Vol.25 No.1, pp.117-184, 2009.