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RF Loss Minimization Method Using High Impedance Filter for Research  

Wang, Hyun-Chul (School of Electrical, Electronics and Communication Engineering Korea University of Technology and Education)
Seo, Hwa-Il (School of Electrical, Electronics and Communication Engineering Korea University of Technology and Education)
Publication Information
Journal of the Semiconductor & Display Technology / v.19, no.1, 2020 , pp. 55-60 More about this Journal
Abstract
This study designed High impedance filter to reduce RF loss to heater heating wire and increase RF current flowing to heater ground wire. Effects such as D / R improvement and process reproducibility could be seen. In addition, RF parameter distribution optimization was possible by understanding the RF path of PE-CVD equipment using Plasma and designing filter.
Keywords
RF; RF Loss; Filter; Impedance; PE-CVD; AlN-Heater; SiON; Deposition rate; Semiconductor;
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