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SCADA System for Semiconductor Equipment Condition Monitoring  

Lee, Youn Ji (Department of Electronics Engineering, Myongji University)
Yun, Hak Jae (Department of Electronics Engineering, Myongji University)
Park, Hyoeun (Department of Electronics Engineering, Myongji University)
Hong, Sang Jeen (Department of Electronics Engineering, Myongji University)
Publication Information
Journal of the Semiconductor & Display Technology / v.18, no.4, 2019 , pp. 92-95 More about this Journal
Abstract
Automation control and the data for control of industrial equipment for the diagnosis and prediction is a key to success in the 4th industrial revolution. It increases process efficiency and productivity through data collection, realtime monitoring, and the data analysis. However, university and research environment are still suffering from logging the data in manual way, and we occasionally loss the equipment data logging due to the lack of automatic data logging system. State variable presents the current condition of the equipment operation which is closely related to process result, and it is valuable to monitor and analyze the data for the equipment health monitoring. In this paper, we demonstrate the collection of equipment state variable data via programmable logic controller (PLC) and the visualization of the collected data over the Web access supervisory control and data acquisition (SCADA). Test vehicle for the implementation of the suggested SCADA system is a relay switched physical vapor deposition system in the university environment.
Keywords
SCADA; PLC; Equipment condition monitoring; State variables;
Citations & Related Records
Times Cited By KSCI : 2  (Citation Analysis)
연도 인용수 순위
1 Xiongwen Zhang "Thermal Analysis of a Cylindrical Lithi-um-ion Battery", Journal of Electrochemical Acta 56, pp. 1246-1255, 2011.   DOI
2 H. D. Song, S. S. Han, and S. H. Beack, "Analysis of Industry 4.0 Standard and Standardization of Smart Factory in Korea," Journal of Standards, Certification and Safety, 6(4), pp. 47-58, (2016).
3 J. P. Park, "Analysis on Success Cases of Smart Factory in Korea: Leveraging from Large, Medium, and Small Size Enterprises," Journal of Digital Convergence, 15(5), pp. 107-115, (2017).   DOI
4 H. S. Kim and D. G. Park, "Implementation of abnormal behavior detection system based packet analysis for industrial control system security," Journal of Korea Academia-Industrial cooperation Society, 19(4), pp. 47-56, (2018).   DOI
5 Y. S. Cho, S. M. Lee, H. J. Kim, and S. B. Kim, "Detection of Faulty Equipment Sequence of Multivariate Processes in Semiconductor Manufacturing," Journal of the Korean Institute of Industrial Engineers, 44(5), pp. 325-333, (2018).   DOI
6 B. K. Sun, K. R. Han, K. W. Rim, "Study on Development of Embedded HMI System for PLC Monitoring," Journal of the Institute of Electronics Engineers of Korea, 42(4), pp. 1-10, (2005).