Investigation of Ge2Sb2Te5 Etching Damage by Halogen Plasmas |
Jang, Yun Chang
(Department of Energy Systems Engineering, Seoul National University)
Yoo, Chan Young (Department of Materials Science and Engineering, Seoul National University) Ryu, Sangwon (Department of Energy Systems Engineering, Seoul National University) Kwon, Ji Won (Department of Energy Systems Engineering, Seoul National University) Kim, Gon Ho (Department of Energy Systems Engineering, Seoul National University) |
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