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Design of an Active Damper for Suppressing Vibrations of Inspection and Measurement Devices  

Noh, Ho Chul (Graduate School, Kumoh National Institute of Technology)
Ro, Seung Hoon (Dept. of Mechanical System Engineering, Kumoh National Institute of Technology)
Ryu, Young Chan (ACE Ino-tech Co., Ltd.)
Yi, Il Hwan (TVS Co., Ltd.)
Jung, Geum Sub (Dept. of Smart Electronics, Gumi Campus of Korea Polytechnic)
Kim, Young Jo (Dept. of Mechanical Engineering, Gumi University)
Publication Information
Journal of the Semiconductor & Display Technology / v.18, no.1, 2019 , pp. 15-20 More about this Journal
Abstract
Inspection and measurement of surface quality is one of the most critical processes for manufacturing products such as semiconductor wafers, sapphire substrates, and display panels. The vibrations of the inspection and measurement devices are supposed to be the most dominant factors for severe measurement errors and longer measuring time. In this study, dynamic characteristics of an inspection and measurement device are analyzed through frequency response experiment and computer simulation to obtain parameters such as frequencies, magnitudes, mode shapes, and periods of vibrations. And then an active damper which consists of sensor, interface board, and actuator is designed based on the parameters to formulate the most effective reaction signal to suppress the vibrations which is generated by an interface board, and provided by an actuator. If the vibrations are measured by the sensor, the active damper immediately generates and provides the corresponding reaction signal to inspection and measurement device. The result shows that the active damper can suppress structural vibrations effectively and reduce measuring time of the device and enhance the productivity.
Keywords
Inspection and Measurement Device; Dynamic Characteristics; Vibration Parameters; Active Damper; Vibration Suppression; Measuring Time Reduction; High Productivity;
Citations & Related Records
Times Cited By KSCI : 1  (Citation Analysis)
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