Silicon Etching Process of NF3 Plasma with Residual Gas Analyzer and Optical Emission Spectroscopy in Intermediate Pressure |
Kwon, Hee Tae
(Kwangwoon University Dept. of Electrical and Biological Physics)
Kim, Woo Jae (Kwangwoon University Dept. of Electrical and Biological Physics) Shin, Gi Won (Kwangwoon University Dept. of Electrical and Biological Physics) Lee, Hwan Hee (Kwangwoon University Dept. of Electrical and Biological Physics) Lee, Tae Hyun (Kwangwoon University Dept. of Electrical and Biological Physics) Kwon, Gi-Chung (Kwangwoon University Dept. of Electrical and Biological Physics) |
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