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DC Sputtering Process of 2-Dimensional Tungsten Disulfide Thin Films on Soda-Lime Glass Substrates  

Ma, Sang Min (Department of Electronics Engineering, Gachon University)
Kwon, Sang Jik (Department of Electronics Engineering, Gachon University)
Cho, Eou Sik (Department of Electronics Engineering, Gachon University)
Publication Information
Journal of the Semiconductor & Display Technology / v.17, no.3, 2018 , pp. 31-35 More about this Journal
Abstract
Tungsten disulfide($WS_2$) thin films were directly deposited by direct-current(DC) sputtering and annealed by rapid thermal processing(RTP) to materialize two-dimensional p-type transition metal dichalcogenide (TMDC) thin films on soda-lime glass substrates without any complicated exfoliation/transfer process. $WS_2$ thin films deposited at various DC sputtering powers from 80 W to 160W were annealed at different temperatures from $400^{\circ}C$ to $550^{\circ}C$ considering the melting temperature of soda-lime glass. The optical microscope results showed the stable surface morphologies of the $WS_2$ thin films without any defects. The X-ray photoelectron spectroscopy (XPS) results and the Hall measurement results showed stable binding energies of W and S and high carrier mobilities of $WS_2$ thin films.
Keywords
Tungsten Disulfide ($WS_2$); DC Sputtering; Rapid Thermal Processing (RTP); Soda-Lime Glass;
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Times Cited By KSCI : 1  (Citation Analysis)
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