Monitoring and Controlling Uniformity of Plasma Emission Intensity for IGZO Sputtering Process |
Choi, Jinwoo
(Kwangwoon Univ. Dep. of Electrical and Biological Physics)
Hwang, Sang Hyuk (Kwangwoon Univ. Dep. of Electrical and Biological Physics) Kim, Woo Jae (Kwangwoon Univ. Dep. of Electrical and Biological Physics) Shin, Gi Won (Kwangwoon Univ. Dep. of Electrical and Biological Physics) Kwon, Heui Tae (Kwangwoon Univ. Dep. of Electrical and Biological Physics) Jo, Tae Hoon (Kwangwoon Univ. Dep. of Electrical and Biological Physics) Woo, Won Gyun (WONWOO SYSTEMS CO., LTD.) Cha, Sung Duk (WONWOO SYSTEMS CO., LTD.) An, Byung Chul (AVACO CO., LTD.) Park, Wan Woo (AVACO CO., LTD.) Do, Jae Chul (AVACO CO., LTD.) Kwon, Gi-Chung (Kwangwoon Univ. Dep. of Electrical and Biological Physics) |
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