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Study on the Sensor Development for Liquid Contamination during Delivery  

Jeong, Yi Ha (Department of Industrial Design Engineering, KOREATECH)
Kim, Byung Han (SGM Co., Ltd.)
Hong, Joo-Pyo (Department of Industrial Design Engineering, KOREATECH)
Publication Information
Journal of the Semiconductor & Display Technology / v.15, no.2, 2016 , pp. 70-73 More about this Journal
Abstract
Previously proposed contamination detecting sensor was revisited for the investigation of the liquid tendency. Experiments revealed different output voltages for several kinds of liquid input, but showed same values for various flow rates of each liquid. The transmittance of the liquid was measured, and it is well correlated with the voltages. Linearity in values and the compensation of the sensor to sensor deviation were tried to obtain. And, long term test was performed as attached at the manufacturing equipment in the field.
Keywords
contamination detection; transmittance; liquid delivery; flow rate; semiconductor manufacturing;
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1 Hwang, C. J., "ALD (Atomic Layer Deposition) Process Technology in the Semiconductor Industry," Physics & High Technology, Jan/Feb, pp.37-41, (2012). DOI: 10.3938/PhiT.21.006   DOI
2 Cho, K. S., Shin, J. S., and Kim, J. H., "Measurement of Particle Size and Particle Size Distribution," Polymer Science and Technology, Vol. 15, No. 2, pp.198-208, (2004).
3 Shin, E. C., Cho, S. J., Ryoo, H. N., Shelefontyuk, D., and Kim, D. H., "Development of Optical Particle Counter (OPC)," Optical Society Korea Summer Meeting, pp.280-281, (2004).
4 Bae G. N., "Investigation of the Performance Characteristics of an In-Situ Particle Monitor at Low Pressures Using Aerodynamic Lenses," J. KSME B, Vol.24, No.10, pp.1359-1367, (2000).
5 Lee, K, Kim, Q. H., and Jhe, W., "Novel Research on a Nano liquid: Application to the Study of Light-induced Super wetting on $TiO_2$," Physics & High Tech., Sep., pp.24-30, (2014). DOI: 10.3938/PhiT.23.035   DOI
6 Lee, C. H., Jeon, K. M., Shin, J. S, Yun, J. Y., Cho, S., and Kang, S. W., "The Development of the Contamination Prevention Module of an Optical Window Using Ultrasonic Waves," J. of the Korean Vacuum Society, Vol.22, No.4, pp.175-180, (2013).   DOI
7 Jeong, Y. H, Kim, B. H, and Hong, J. P., "A study on the device development for the contamination detection in the delivery line," J. of KSDT, vol.14, No.1, pp.45-49, (2015).
8 www.matweb.com
9 Ko, K. S., Lee, J. H., Yoo, J., Lee, M. S., Lee, J. D., Hyun, H. N., and Kim, Y. G., "Optimum Conditions of Sample Preparation for Measuring Tea Extract Color Using Color Difference Meter," J. of The Korean Tea Society, Vol.17, No.1, pp.34-40, (2011).