Study on the Flat Zone Expansion and Temperature Deviation Reduction of Low Temperature Furnace for Semiconductor Process |
Joo, Kang Wo
(KOREATECH School of Mechatronics Engineering)
Shim, Seung Sool (YesT CO., Ltd.) Jang, Hyeok (JLT CO., Ltd.) Lee, You Young (Korea Polytechnics Asan) Kim, Kwang Sun (KOREATECH School of Mechatronics Engineering) |
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