The Silicon Nitride Films according to The Frequency Conditions of Plasma Enhanced Chemical Vapor Deposition |
Choi, Jeong-Ho
(Dept. of Electrical & Electronic & Communication Engineering, Korea University of Technology and Education)
Roh, Si-Cheol (Dept. of Electrical & Electronic & Communication Engineering, Korea University of Technology and Education) Jung, Jong-Dae (Dept. of Electrical & Electronic & Communication Engineering, Korea University of Technology and Education) Seo, Hwa-Il (Dept. of Electrical & Electronic & Communication Engineering, Korea University of Technology and Education) |
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