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The Implementation of Communication Protocol for Semiconductor Equipments using Directed Diffusion  

Kim, Doo Yong (Department of Electronic Eng., Soonchunhyang University)
Cho, Hyun Chan (Department of Electronic Eng., Korea University of Technology and Education)
Publication Information
Journal of the Semiconductor & Display Technology / v.12, no.2, 2013 , pp. 39-43 More about this Journal
Abstract
The semiconductor equipments generate necessary data through communication networks for the effective manufacturing processes and automation of semiconductor equipments. For transferring data between semiconductor equipments and sending data to monitor equipments, several standards for communication protocols have been proposed. Communication networks in semiconductor manufacturing systems will transmit a lot of data traffic, which can be vulnerable in data delay and network failure. Therefore, it is required that data traffic need to be distributed. To accomplish this objective, we recommend the use of a redundant and valuable communication path which is constructed by a wireless sensor network. In this paper, the directed diffusion method for wireless sensor networking is suggested for networking semiconductor equipments. It is shown that how the directed diffusion is employed to connect semiconductor equipments. Also, we show how to implement the SECS of semiconductor equipments communication protocols based on the directed diffusion.
Keywords
Directed Diffusion; SECS; Semiconductor Equipment Communication Protocol;
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  • Reference
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