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Simultaneous Positioning and Vibration Control of Chip Mounter with Structural Flexibility  

Kang, Min Sig (Dept. of Mechanical Engineering, Gachon University)
Publication Information
Journal of the Semiconductor & Display Technology / v.12, no.1, 2013 , pp. 53-59 More about this Journal
Abstract
Chip mounter which is used to pick chips from the pre-specified position and place them on the target location of PCB is an essential device in semiconductor and LCD industries. Quick and high precision positioning is the key technology needed to increase productivity of chip mounters. As increasing acceleration and deceleration of placing motion, structural vibration induced from inertial reactive force and flexibility of mounter structure becomes a serious problem degrading positioning accuracy. Motivated from these, this paper proposed a new control design algorithm which combines a mounter structure acceleration feedforward compensation and an extended sliding mode control for fine positioning and suppression of structural vibration, simultaneously. The feasibility of the proposed control design was verified along with some simulation results.
Keywords
Chip mount device; XY-table; Structural flexibility; Acceleration feedforward compensation; Sliding mode control;
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1 Park, S. W., Hong, S. W., Choi, H. S., and Singhose, W. E., " A Study on Dynamic Performance of of Precise XY Stage Using Real-time Input Shaping, "Proc. of the ISMTII 2007, Sendai, Japan, 2007.
2 Huey, J. R. and Singhose, W., "Design of Proportional- Derivative Feedback and Input Shaping for Control of Inertia Plants," IET Control Theory Application, Vol. 6, No. 3, pp.357-364, 2010.
3 Liu, K. P. and Li, Y. C., "Vibration Suppression for a Class of Flexible Manipulator Control with Input Shaping Technique," Proc. of the 5-th International Conference on Machine Learning and Cybernetics, Dalian, pp.835-839, 2006.
4 Cole, M. O. T., "A Class of Low-pass FIR Input Shaping Filters Achieving Exact Residual Vibration Cancelation," Automatica, Vol. 48, pp.2377-2380, 2012.   DOI   ScienceOn
5 Cole, M. O. T., and Wongratanaphisan, T., "Optimal FIR Input Shaper Designs for Motion Control with Zero Residual Vibration," Transactions of the ASME, Journal of Dynamic Systems, Measurement, and Control, Vol. 133, No. 2, 2011.
6 Bae, G. H., Park, A. Y., and Hong, S. W., "Vibration Reduction for Positioning-System Base Subjected to Moving Stage Using Command Shaping," 12-th International Conference on Control, Automation and Systems, pp.656-660, 2012.
7 Kim, J. J., Choi, Y. M., and Kim K. H., "A New Mode Switching Control for Fast Settling and High Precision Positioning," J. of the Semiconductor & Display Equipment Technology, Vol. 5, No. 4, pp.1-4, 2006.
8 Edward, C. and Spurgeon, S. K., Sliding Mode Control Theory and Application. Taylor & Francis Ltd. 1998.
9 Utkin, V. I., Guldner, J., and Shi, J., Sliding Mode Control in Electromechanical Systems. New-York: Taylor & Francis. 1999.
10 Young, D. K., Utkin, V. I., and Ozguner, A., "Control Engineer's Guide to Sliding Mode Control." IEEE Trans. on Control Systems Technology, Vol. 7, No. 3, pp. 328-342, 1999.   DOI   ScienceOn
11 Kawamura, A., Itoh, H., and Sakamoto, K., "Chattering Reduction of Disturbance Observer Based Sliding Mode Control. IEEE Trans. Ind. Application, Vol. 41, No. pp. 456-461, 1994.
12 Lee, J. K., Park, B. S., Kim, K. H., and Kang, M. S., "Chatter-free Sliding Mode Control for Inertial Stabilization of OTM (On-the-move) Antenna Driven by Gear and Flexible Shaft," International Journal of Precision Engineering and manufacturing, Vol.13, No.8, pp.1317-1325, 2012.   DOI   ScienceOn
13 Ayob M. and Kendall, G., "A Survey of Surface Mount Device Placement Machine Optimization: Machine Classification," European Journal of Operational Research, Vol. 186, pp. 893-914, 2008.   DOI   ScienceOn
14 Kang, M. S., Yoon, W. H., and Lee, J. B., "LOS Stabilization Control of OTM Antenna Driven by Geared Flexible Transmission," KSNVE, Vol. 21, No. 10, pp. 951-959. 2011.   DOI