A Study on Silicon Nitride Films by high frequency PECVD for Crystalline Silicon Solar Cells
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Kim, Jeong-Hwan
(Dept. of Electrical & Electronic & Communication Engineering, Korea University of Technology and Education)
Roh, Si-Cheol (Dept. of Electrical & Electronic & Communication Engineering, Korea University of Technology and Education) Choi, Jeong-Ho (Dept. of Electrical & Electronic & Communication Engineering, Korea University of Technology and Education) Jung, Jong-Dae (Dept. of Electrical & Electronic & Communication Engineering, Korea University of Technology and Education) Seo, Hwa-Il (Dept. of Electrical & Electronic & Communication Engineering, Korea University of Technology and Education) |
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