Development of rotary-magnet type magnetron source for large area sputtering on flexible substrate |
Cho, Chan Seob
(School of EE, Kyungpook Nat'l Univ.)
Yun, Sung Ho (Ultech Co., Ltd.) Kim, Bong Hwan (Dept. Electronics Engineering, Catholic University of Daegu) Kim, Kwang Tae (School of EE, Kyungpook Nat'l Univ.) Jung, Young Chul (Dept. Computer and Information Engineering, Gyeongju Univ.) Lee, Jong Hyun (School of EECS, Kyungpook Nat'l Univ.) |
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