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Study on Experimental Selection of Parameters in Laser Scattering Mechanism and Analysis of Laser Scattering Patterns in Solar Cell Wafer  

Kim, Gyung-Bum (Aeronautical & Mechanical Design Engineering, Chungju National University)
Publication Information
Journal of the Semiconductor & Display Technology / v.10, no.2, 2011 , pp. 7-12 More about this Journal
Abstract
In this paper, a laser scattering mechanism are designed to detect micro defects such as dent, scratch, pinhole, etc. Its influential parameters are experimentally selected and scattering patterns of micro defects have been analyzed for silicon wafer in solar cell. As a result of experiments, scattered lights are rather increased in wafer surface with micro defects, in comparison to no micro ones. Scattering parameters are optimally selected for obtaining robust and high quality laser scattering images of micro defects. It is shown that scattered light components are linearly increased according to the increase of micro defect sizes, and the depth of micro-defects give a large influence on optical deflection.
Keywords
Laser scattering mechanism; Laser scattering pattern; Micro defect; Solar cell wafer;
Citations & Related Records
Times Cited By KSCI : 1  (Citation Analysis)
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