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DSMC Simulation of a Point Cell-source for OLED Deposition Process  

Jun, Sung-Hoon (Division of Mechanical & Automotive Engineering Kongju National University)
Lee, Eung-Ki (Division of Mechanical & Automotive Engineering Kongju National University)
Publication Information
Journal of the Semiconductor & Display Technology / v.9, no.3, 2010 , pp. 11-16 More about this Journal
Abstract
The performance of an OLED fabrication system strongly depends on the design of the evaporation cell-source. Therefore, necessity of the preceding study for cell source development of new concept is becoming increase. A development plan to substitute for experiment is applied as use simulation. In this study interpret behavior of a particle through DSMC techniques, and in this paper presenting a form to make so as to have better performance of the pointtype cell source which had a nozzle.
Keywords
OLED (Organic light-emitting device); vacuum evaporation; thin film; DSMC (Direct simulation monte carlo);
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Times Cited By KSCI : 1  (Citation Analysis)
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