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| 1 |
NEMS 기술개요 및 동향
Jo Yeong-Ho;
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The Institute of Electronics and Information Engineers
, v.33, no.4, pp.16-27,
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| 2 |
NEMS 공정.장비 기술
Choi Jun-Hyeok;Jeong Jun-Ho;Lee Eung-Suk;
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The Institute of Electronics and Information Engineers
, v.33, no.4, pp.28-38,
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| 3 |
Nanoimprint Lithography 기술의 이해
Gang Sin-Il;
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The Institute of Electronics and Information Engineers
, v.33, no.4, pp.39-48,
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