Browse > Article List

논문
1 An Experimental Study on Optimal Condition of Aerodynamic Lens in the Modified ISPM
임효재;차옥환;설용태; / The Korean Society Of Semiconductor & Display Technology , v.3, no.2, pp.1-4,
2 EUVL Mask Defect Isolation and Repair using Focused Ion Beam
김석구;백운규;박재근; / The Korean Society Of Semiconductor & Display Technology , v.3, no.2, pp.5-9,
3 A Study on Cleaning Processes for Ti/TiN Scales on Semiconductor Equipment Parts
유정주;배규식; / The Korean Society Of Semiconductor & Display Technology , v.3, no.2, pp.11-15,
4 Preparation of AlN thin films on silicon by reactive RF magnetron sputtering
조찬섭;김형표; / The Korean Society Of Semiconductor & Display Technology , v.3, no.2, pp.17-21,
5 Measurement of mechanical properties of SU-8 thin film by tensile testing
백동천;박태상;이순복;이낙규; / The Korean Society Of Semiconductor & Display Technology , v.3, no.2, pp.23-26,
6 Development of a Micro Tensile Tester for the Material Characterization and the Reliability Estimation of Micro Components
이낙규;최석우;임성주;최태훈;이형욱;나경환; / The Korean Society Of Semiconductor & Display Technology , v.3, no.2, pp.27-33,
7 Application of Laser Interferometry for Assessment of Surface Residual Stress by Determination of Stress-free State
김동원;이낙규;나경환;권동일; / The Korean Society Of Semiconductor & Display Technology , v.3, no.2, pp.35-40,
8 Error Compensation of Laser Interferometer for Measuring Displacement Using the Kalman Filter
Park, Tong-Jin;Lee, Yong-Woo;Wang, Young-Yong;Han, Chang-Soo;Lee, Nak-Ku;Lee, Hyung-Wok;Choi, Tae-Hoon;Na, Kyung-Whan; / The Korean Society Of Semiconductor & Display Technology , v.3, no.2, pp.41-46,