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| 1 |
An Experimental Study on Optimal Condition of Aerodynamic Lens in the Modified ISPM
임효재;차옥환;설용태;
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The Korean Society Of Semiconductor & Display Technology
, v.3, no.2, pp.1-4,
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| 2 |
EUVL Mask Defect Isolation and Repair using Focused Ion Beam
김석구;백운규;박재근;
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The Korean Society Of Semiconductor & Display Technology
, v.3, no.2, pp.5-9,
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| 3 |
A Study on Cleaning Processes for Ti/TiN Scales on Semiconductor Equipment Parts
유정주;배규식;
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The Korean Society Of Semiconductor & Display Technology
, v.3, no.2, pp.11-15,
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| 4 |
Preparation of AlN thin films on silicon by reactive RF magnetron sputtering
조찬섭;김형표;
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The Korean Society Of Semiconductor & Display Technology
, v.3, no.2, pp.17-21,
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| 5 |
Measurement of mechanical properties of SU-8 thin film by tensile testing
백동천;박태상;이순복;이낙규;
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The Korean Society Of Semiconductor & Display Technology
, v.3, no.2, pp.23-26,
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| 6 |
Development of a Micro Tensile Tester for the Material Characterization and the Reliability Estimation of Micro Components
이낙규;최석우;임성주;최태훈;이형욱;나경환;
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The Korean Society Of Semiconductor & Display Technology
, v.3, no.2, pp.27-33,
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| 7 |
Application of Laser Interferometry for Assessment of Surface Residual Stress by Determination of Stress-free State
김동원;이낙규;나경환;권동일;
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The Korean Society Of Semiconductor & Display Technology
, v.3, no.2, pp.35-40,
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| 8 |
Error Compensation of Laser Interferometer for Measuring Displacement Using the Kalman Filter
Park, Tong-Jin;Lee, Yong-Woo;Wang, Young-Yong;Han, Chang-Soo;Lee, Nak-Ku;Lee, Hyung-Wok;Choi, Tae-Hoon;Na, Kyung-Whan;
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The Korean Society Of Semiconductor & Display Technology
, v.3, no.2, pp.41-46,
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