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| 1 |
Electrolyzed Water Cleaning for Semiconductor Manufacturing
류근걸;김우혁;이윤배;이종권;
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The Korean Society Of Semiconductor & Display Technology
, v.2, no.3, pp.1-6,
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| 2 |
Via Contact and Deep Contact Hole Etch Process Using MICP Etching System
설여송;김종천;
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The Korean Society Of Semiconductor & Display Technology
, v.2, no.3, pp.7-11,
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| 3 |
An Embedded Web Server for Remote Monitoring the Semiconductor Equipment
윤한경;임성락;
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The Korean Society Of Semiconductor & Display Technology
, v.2, no.3, pp.13-18,
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| 4 |
Role of Magnetic Field Configuration in a Performance of Extended Magnetron Sputtering System with a Cylindrical Cathode
Chun, Hui-Gon;Sochugov, Nikolay S.;You, Yong-Zoo;Soloviv, Andrew A.;Zakharov, Alexander N,;
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The Korean Society Of Semiconductor & Display Technology
, v.2, no.3, pp.19-23,
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| 5 |
A Study on Vector control of AC motor using Low-Voltage DSP for semiconductor transportation equipments
홍선기;방승현;최치영;
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The Korean Society Of Semiconductor & Display Technology
, v.2, no.3, pp.25-30,
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| 6 |
A Study on the FEM Analysis and Gripping Force Control of End-Effector for the Wafer Handling Robot System
권오진;최성주;이우영;이강원;박원규;
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The Korean Society Of Semiconductor & Display Technology
, v.2, no.3, pp.31-36,
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| 7 |
A Study on the Dynamic Design of Anti-Vibration Structures for Nano-class Measuring System
전종균;김강부;백재호;
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The Korean Society Of Semiconductor & Display Technology
, v.2, no.3, pp.37-43,
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