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| 1 |
Development and Application of Rotating Compensator Spectroscopic Ellipsometer
이재호;방경윤;박준택;오혜근;안일신;
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The Korean Society Of Semiconductor & Display Technology
, v.2, no.2, pp.1-4,
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| 2 |
Characteristics of TaN Film as to Cu Barrier by PAALD Method
부성은;정우철;배남진;권용범;박세종;이정희;
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The Korean Society Of Semiconductor & Display Technology
, v.2, no.2, pp.5-8,
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| 3 |
Development of Real Time Thickness Measurement System of Thin Film for 12" Wafer Spin Etcher
김노유;서학석;
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The Korean Society Of Semiconductor & Display Technology
, v.2, no.2, pp.9-15,
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| 4 |
The Design of High-Speed Transistor Junction Technology
이준하;이흥주;문원하;
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The Korean Society Of Semiconductor & Display Technology
, v.2, no.2, pp.17-20,
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| 5 |
Development of Seam Seal Welding System for Semiconductor Package
이우영;진경복;오장환;김경수;
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The Korean Society Of Semiconductor & Display Technology
, v.2, no.2, pp.21-24,
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| 6 |
A Study on the Structural Dynamic Modification of Sub-structure of Clean Room Considering Vibration Criteria
손성완;이홍기;백재호;
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The Korean Society Of Semiconductor & Display Technology
, v.2, no.2, pp.25-30,
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| 7 |
Study of Dual Servo System for Measurement System of Mechanical Property
최현석;송치우;한창수;이형욱;최태훈;이낙규;나경환;
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The Korean Society Of Semiconductor & Display Technology
, v.2, no.2, pp.31-37,
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| 8 |
반도체장비 산업현황(하)
이주훈;
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The Korean Society Of Semiconductor & Display Technology
, v.2, no.2, pp.39-42,
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