한국전기전자재료학회논문지 (Journal of the Korean Institute of Electrical and Electronic Material Engineers)

  • 제37권6호
  • /
  • Pages.609-613
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  • 2024
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  • 1226-7945(pISSN)
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  • 2288-3258(eISSN)
한국전기전자재료학회 (The Korean Institute of Electrical and Electronic Material Engineers)
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알루미나 시트의 Packing Density가 소결 거동에 미치는 영향

Effect of Packing Density of Alumina Sheet on Sintering Behavior

  • 한희현 (한국세라믹기술원 세라믹종합솔루션센터) ;
  • 최진식 (한국세라믹기술원 세라믹종합솔루션센터) ;
  • 박지훈 (한국세라믹기술원 세라믹종합솔루션센터) ;
  • 신효순 (한국세라믹기술원 세라믹종합솔루션센터) ;
  • 여동훈 (한국세라믹기술원 세라믹종합솔루션센터)
  • Hee Hyun Han (Ceramic Total Solution Center, Korea Institute of Ceramic Engineering & Technology) ;
  • Jin Sik Choe (Ceramic Total Solution Center, Korea Institute of Ceramic Engineering & Technology) ;
  • Zee-Hoon Park (Ceramic Total Solution Center, Korea Institute of Ceramic Engineering & Technology) ;
  • Hyo-Soon Shin (Ceramic Total Solution Center, Korea Institute of Ceramic Engineering & Technology) ;
  • Dong-Hun Yeo (Ceramic Total Solution Center, Korea Institute of Ceramic Engineering & Technology)
  • 투고 : 2024.09.27
  • 심사 : 2024.10.02
  • 발행 : 2024.11.01
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초록

As the operating environment in semiconductor processes becomes demanding, research is being conducted to manufacture dense alumina substrates without defects after sintering to ensure high durability of electrostatic chucks, which are critical components in semiconductor equipment. Therefore, in this study, in order to manufacture green sheets with a high filling ratio for implementing a high-density substrate, alumina powders with average particle sizes of 2.07 ㎛ (L) and 0.37 ㎛ (S) were mixed in ratios of 9:1, 8:2, 7:3, and 6:4, respectively, and green sheets were manufactured and the filling ratio and sintering behavior were observed. Green sheets were fabricated by preparing a slurry using organic materials in Al2O3 powders of different particle sizes. The packing density of the green sheet mixed with L and S alumina powders with different average particle sizes in a ratio of 7:3 before and after binder burn-out showed the highest values of 3.19 g/cm3 and 2.87 g/cm3, respectively. As a result of observing the sintered density based on the mixing ratio of alumina powders revealed that the alumina sheet mixed at a 6:4 ratio of L and S powders, sintered at 1,700℃, exhibited the best sintering characteristics with a density of 3.96 g/cm3.

키워드

과제정보

본 연구는 2023년도 중소벤처기업부의 [중소기업기술혁신개발사업(강소기업100)]의 지원에 의한 연구임 [과제번호: RS-2021-TI019674].

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