한국광학회지 (Korean Journal of Optics and Photonics)

  • 제34권6호
  • /
  • Pages.241-247
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  • 2023
  • /
  • 1225-6285(pISSN)
  • /
  • 2287-321X(eISSN)
한국광학회 (Optical Society of Korea)
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레이저에 의해 생성된 Si 박막의 주기적 표면 구조에서의 도파모드 공진 연구

Guided-mode Resonances in Periodic Surface Structures Induced on Si Thin Film by a Laser

  • 이지혁 (고려대학교 디스플레이반도체물리학부) ;
  • 이윤주 (고려대학교 디스플레이반도체물리학부) ;
  • 홍현 (고려대학교 디스플레이반도체물리학부) ;
  • 조은솔 (고려대학교 디스플레이반도체물리학부) ;
  • 박지영 (고려대학교 디스플레이반도체물리학부) ;
  • 김주현 (고려대학교 디스플레이반도체물리학부) ;
  • 강민진 (고려대학교 응용물리학과) ;
  • 황의선 (고려대학교 응용물리학과) ;
  • 정병호 (고려대학교 응용물리학과)
  • Ji Hyuk Lee (Division of Display and Semiconductor Physics, Korea University) ;
  • Yoon Joo Lee (Division of Display and Semiconductor Physics, Korea University) ;
  • Hyun Hong (Division of Display and Semiconductor Physics, Korea University) ;
  • Eun Sol Cho (Division of Display and Semiconductor Physics, Korea University) ;
  • Ji Young Park (Division of Display and Semiconductor Physics, Korea University) ;
  • Ju Hyeon Kim (Division of Display and Semiconductor Physics, Korea University) ;
  • Min Jin Kang (Department of Applied Physics, Korea University) ;
  • Eui Sun Hwang (Department of Applied Physics, Korea University) ;
  • Byoung-Ho Cheong (Department of Applied Physics, Korea University)
  • 투고 : 2023.08.11
  • 심사 : 2023.10.10
  • 발행 : 2023.12.25
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초록

본 연구에서는 355 nm 파장의 나노초 레이저를 비정질 실리콘 박막에 조사하여 형성된 주기적 laser-induced periodic surface structure (LIPSS) 구조의 분광학적 특성을 연구하였다. 지름 196 ㎛의 가우시안 빔을 단위면적당 레이저 펄스 190-280회, 레이저 빔의 세기는 100-130 mJ/cm2 범위에서 'ㄹ' 자 형태로 2차원 스캔하였다. 그 결과 Si 박막 표면에 ~300 nm 주기의 LIPSS 구조가 레이저 편광에 수직 방향으로 정렬되었다. 시료의 투과율 스펙트럼을 측정하여 transverse-electric 편광과 transverse-magnetic 편광에 대해서 각각 700 nm, 500 nm 근방에서 dip이 관측되었다. 이 현상을 설명하기 위해 1차원 격자구조 모델을 이용하여 rigorous coupled-wave analysis를 이용한 시뮬레이션을 하여 편광에 따른 도파모드 공진에 의한 특성임을 규명하였다.

We examine the spectral characteristics of laser-induced periodic surface structures (LIPSSs) formed on an amorphous silicon film irradiated by a 355-nm nanosecond laser. A Gaussian beam with a diameter of 196 ㎛ is used to perform a two-dimensional raster scan. The laser's pulse number is varied from 190 to 280, and its intensity is adjusted within 100-130 mJ/cm2. LIPSSs with a periodicity of approximately 330 nm form on the surface of the Si film, aligned perpendicular to the laser's polarization. Transmission spectra of the samples show dips around 700 nm for transverse electric polarization and around 500 nm for transverse magnetic polarization. The features are investigated with a one-dimensional-grating model using a rigorous coupled-wave analysis. Simulations confirm that the observed dips are due to the resonant modes, depending on the polarization.

키워드

과제정보

본 연구는 산업통상자원부의 '화면크기 10인치급 초박형 유리의 건식 이온교환 기반 영속식 화학강화 공정기술 개발과제(no. 20015627)'의 지원으로 수행되었음.

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