과제정보
This research was supported by grants (2018R1A6A1A03024334, 2019R1A2C1007637, 2021M3I3A1082880, 2021R1I1A1A01044174) of the Basic Science Research Program through the National Research Foundation of Korea (NRF) and grant (2019R1A6C1010024) of the Basic Science Research Capacity Enhancement Project through the Korea Basic Science Institute. The authors are grateful to the Center for Research Facilities at Chonnam National University for their assistance in the analysis of the GaN and NH3-treated GaN films using FESEM and XRD.
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