한국응용과학기술학회지 (Journal of the Korean Applied Science and Technology)

  • 제40권5호
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  • Pages.1116-1125
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  • 2023
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  • 1225-9098(pISSN)
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  • 2288-1069(eISSN)
한국응용과학기술학회 (The Korean Society of Applied Science and Technology)
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다중 졸-겔 방법에 의해 증착된 ZnO 막의 형태적 및 구조적 특성평가

Morphological and Structural Characterization of ZnO Films Deposited by Multiple Sol-Gel Methods

  • Muhammad Saqib (Department of Electronic Engineering, Jeju National University) ;
  • Woo Young Kim (Department of Electronic Engineering, Jeju National University)
  • 투고 : 2023.08.24
  • 심사 : 2023.10.30
  • 발행 : 2023.10.31
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⟨ 이전 논문 다음 논문 ⟩

초록

산화아연 막은 투명한 전도성 물질로써 다양한 분야의 광전자소자에 이용되고 있다. 그러므로 산화아연 막의 특성을 규명하는 것은 광전자소자의 성능을 높이는데 매우 중요한 역할을 할 것이다. 본 논문에서는 이러한 산화아연 막을 용액공정 기반으로 제작하여 형태적, 구조적 특성을 평가하고자 한다. 구체적으로는 졸-겔 방법을 반복적으로 시행하여, 시행 횟수에 따른 산화아연 막의 물성의 변화를 관찰할 것이다. 일정한 용액 조건하에서, 5회의 반복적인 졸-겔 방법을 시행한 결과 결정화가 진행되는 것을 확인하였다. 7회 이상에서는 원소 구성 및 결정화도가 특정 값에 수렴하는 경향을 보였다. 최종적인 산화아연 막의 평균결정의 크기는 약 10.7 nm 정도로 계산되었다. 본 연구를 통해 최적의 결정화를 보이는 공정횟수는 7회였다. 본 연구 결과 및 방법론은 다양한 용액공정 변수를 가변시키면서 적용할 수가 있고 최적의 공정조건을 확립하는데 기여할 것으로 기대한다.

Zinc oxide film is a transparent conductive material and is used in optoelectronic devices in various fields. Therefore, characterization of the zinc oxide film will play a very important role in improving the performance of optoelectronic devices. Here, we will evaluate the morphological and structural characteristics of such a zinc oxide film based on the solution process. Specifically, the sol-gel method will be repeatedly performed to observe the change in material properties of the zinc oxide film according to the number of times of spin-coating. It was confirmed that crystallization proceeded as a result of performing the sol-gel method repetitively 5 times under constant solution conditions. At 7 times or more, the element composition and crystallinity tended to converge to a specific value. The average crystal size of the final zinc oxide film was calculated to be about 10.7 nm. In this study, the number of processes showing optimal crystallization was 7 times. The results and methodology of this study can be applied while varying various solution process variables and are expected to contribute to establishing optimal process conditions.

키워드

과제정보

본 연구는 한국연구재단(NRF- 2021R1A4A2000934, 2021R1F1A1062800)에 의해 지원을 받아 수행되었습니다.

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