• 한국환경과학회:학술대회논문집
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• 한국환경과학회 2003년도 봄 학술발표회 발표논문집
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• pp.155-160
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• 2003

Indoor air quality can be affected by indoor sources, ventilation, decay and outdoor levels. Although technologies exist to measure these factors, direct measurements are often difficult. The purpose of this study was to develop an alternative method to characterize indoor environmental factors by multiple indoor and outdoor measurements. Daily indoor and outdoor $NO_2$ concentrations were measured for 30 consecutive days in 28 houses in Brisbane, Australia, and for 21 consecutive days in 37 houses in Seoul, Korea. Using a mass balance model and regression analysis, penetration factor (ventilation rate divided by the sum of ventilation rate and deposition constant) and source strength factor (source strength divided by the sum of ventilation rate and deposition constant) were calculated using multiple indoor and outdoor measurements. Subsequently, the ventilation rate and $NO_2$ source strength were estimated. Geometric means of ventilation rate were 1.44 ACH in Brisbane, assuming a residential $NO_2$ deposition constant of 1.05 $hr^{-1}$, and 1.36 ACH in Seoul, with the measured residential $NO_2$ deposition constant of 0.94 $hr^{-1}$. Source strengths of $NO_2$ were 15.8 $\pm$ 18.2 ${\mu}g$/$m^3$.hr and 44.7 $\pm$ 38.1${\mu}g$/$m^3$.hr in Brisbane and Seoul, respectively. In conclusion, indoor environmental factors were effectively characterized by this method using multiple indoor and outdoor measurements.

• 한국환경보건학회:학술대회논문집
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• 한국환경보건학회 2004년도 International Conference Current Challenges and Advances in Environmental Health
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• pp.45-50
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• 2004

Indoor air quality can be affected by indoor sources, ventilation, decay and outdoor levels. Alt hough technologies exist to measure these factors, direct measurements are often difficult. The purpose of this study was to develop an alternative method to characterize indoor environmental factors by multiple indoor and outdoor measurements. Daily indoor and outdoor NO2 concentrations were measured for 30 consecutive days in 28 houses in Brisbane, Australia, and for 21 consecutive days in 37 houses in Seoul, Korea. Using a mass balance model and regression analysis, penetration factor (ventilation rate divided by the sum of ventilation rate and deposition constant) and source strength factor (source strength divided by the sum of ventilation rate and deposition constant) were calculated using multiple indoor and outdoor measurements. Subsequently, the ventilation rate and NO2 source strength were estimated. Geometric means of ventilation rate were 1.44 ACH in Brisbane, assuming a residential NO2 deposition constant of 1.05 hr-1, and 1.36 ACH in Seoul, with the measured residential NO2 deposition constant of 0.94 hr-1. Source strengths of N02 were 15.8 ${\pm}$ 18.2 ${\mu}$g/m3${\cdot}$hr and 44.7 ${\pm}$ 38.1 ${\mu}$g/m3${\cdot}$hr in Brisbane and Seoul, respectively. In conclusion, indoor environmental factors were effectively characterized by this method using multiple indoor and outdoor measurements.

• 한국환경보건학회:학술대회논문집
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• 한국환경보건학회 2005년도 국제학술대회
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• pp.293-298
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• 2005

Indoor air quality can be affected by indoor sources, ventilation, decay and outdoor levels. Although technologies exist to measure these factors, direct measurements are often difficult. The purpose of this study was to develop an alternative method to characterize indoor environmental factors by multiple indoor and outdoor measurements. Indoor and outdoor NO$_2$ and VOCs(benzene, toluene, xylene) concentrations were measured every 3 days for 60 consecutive days in 30 houses in Seoul, Asan and Daegu, Korea. Using a mass balance model and regression analysis, penetration factor (ventilation rate divided by the sum of ventilation rate and deposition constant) and source strength factor (source strength divided by the sum of ventilation rate and deposition constant) were calculated using multiple indoor and outdoor measurements. Subsequently, NO$_2$ and VOCs source strengths (ppb/hr) and deposition constant (K, hr$^{-1}$) were estimated. Deposition constants of NO$_2$, toluene and xylene were 0.98 ${\pm}$ 0.28, 0.71 ${\pm}$ 0.24 and 0.74 ${\pm}$ 0.53 hr$^{-1}$, respectively. Source strengths of NO$_2$, toluene and xylene were 16.28 ${\pm}$ 7.47,31.25 ${\pm}$ 38.45 and 23.45 ${\pm}$ 19.67 ppb/hr, respectively In conclusion, indoor environmental factors were effectively characterized by this method using multiple indoor and outdoor measurements.

• 한국습지학회지
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• 제23권4호
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• pp.287-295
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• 2021

댐 저수지(dam reservoir wetland)나 농업용 저수지 습지(irrigation reservoir wetland) 같은 시설물은 준공되고 시간이 지남에 따라 침식(erosion), 유사이송(sediment transport), 그리고 유사가 침전(sediment deposition)되어 퇴적이 발생하게 된다. 장기간 유사가 퇴적되면 홍수 및 가뭄 조절 기능에 영향을 주기 때문에 퇴적 문제는 저수지 습지의 유지 관리를 위해 매우 중요하다. 그러나 퇴사에 관한 연구는 가용 자료의 부족으로 인해 주로 경험공식에 의해 추정되어 왔다. 본 연구의 목적은 실측자료 및 경험공식과 더불어 다중회귀모형을 개발하여 비퇴사량(sediment deposition rate)을 산정하고 비교하고자 하였다. 또한, 저수지 습지의 퇴사(reservoir wetland sedimentation) 및 노후화로 인해 2020년 긴 장마에 따른 홍수피해가 발생한 64개소의 저수지 습지에 적용하여 잠재적인 붕괴 원인을 파악하고자 하였다. 대상 저수지는 실측 정보가 있는 한국의 경상남도 밀양시(Miryang city, Gyeongsangnam province)에 위치한 가곡(GaGog) 저수지 등 10개소를 선정하였다. 저수지 유효저수용량 실측자료를 이용하여 비퇴사량을 산정하였고 기존에 개발된 총 4가지 경험공식과 물리적/기후적 특성 등을 고려한 다중회귀모형을 개발하여 비퇴사량을 산정하였다. 비퇴사량 산정 결과, 본 연구에서 개발한 다중회귀모형의 오차가 0.21(m³km²/yr)부터 2.13(m³km²/yr)으로 가장 낮았다. 따라서 다중회귀모형에 의해 추정한 비퇴사량을 토대로 저수지 습지의 유효저수용량에 대한 변화를 분석하였는데 유효저수용량이 0.21(%)부터 16.56(%)까지 감소한 것으로 파악되었다. 또한, 월류 피해가 발생한 저수지 습지의 비퇴사량은 파이핑 피해 등이 발생한 저수지의 비퇴사량 보다 상대적으로 높았다. 즉, 저수지 바닥에 비퇴사량이 축적되면 허용할 수 있는 유효저수용량이 부족해지고, 저수지의 홍수 및 가뭄 조절 능력이 감소되어 호우로 인한 저수지 붕괴 피해가 발생할 수 있다는 것이다.

• 한국환경과학회지
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• 제17권10호
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• pp.1069-1073
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• 2008

Indoor air quality can be affected by indoor sources, ventilation, decay and outdoor levels. Although technologies exist to measure these factors, direct measurements are often difficult. The purpose of this study was to develop an alternative method to characterize indoor environmental factors by multiple indoor and outdoor measurements. Using a mass balance model and regression analysis, penetration factor (ventilation rate divided by the sum of ventilation rate and deposition constant) and source strength factor (source strength divided by the sum of ventilation rate and deposition constant) were calculated using multiple indoor and outdoor measurements. Subsequently, the ventilation rate and $NO_2$ generation rate were estimated. Mean of ventilation rate was 1.41 ACH in houses, assuming a residential N02 deposition constant of 0.94 $hr^{-1}$. Mean generation rate of $NO_2$ was 16.5 ppbv/hr. According to house characterization, inside smoking and family number were higher $NO_2$ generation rates, and apartment was higher than single-family house. In conclusion, indoor environmental factors were effectively characterized by this method using multiple indoor and outdoor measurements.

• Transactions on Electrical and Electronic Materials
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• 제3권3호
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• pp.14-17
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• 2002

The HDP (High Density Plasma) CVD process consists of a simultaneous sputter etch and chemical vapor deposition. As CMOS process continues to scale down to sub- quarter micron technology, HDP process has been widely used fur the gap-fill of small geometry metal spacing in inter-metal dielectric process. However, HBP CVD system has some potential problems including plasma-induced damage. Plasma-induced gate oxide damage has been an increasingly important issue for integrated circuit process technology. In this paper, thin gate oxide charge damage caused by HDP deposition of inter-metal dielectric was studied. Multiple step HDP deposition process was demonstrated in this work to prevent plasma-induced damage by introducing an in-situ top SiH$_4$ unbiased liner deposition before conventional deposition.

• 한국표면공학회:학술대회논문집
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• 한국표면공학회 2007년도 춘계학술발표회 초록집
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• pp.87-88
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• 2007

나노 다결정 실리콘 박막 증착을 하기 위해서 현재 정전결합플라즈마(CCP, Capacitively Coupled Plasma)를 이용한 PECVD(Plasma Enhanced Chemical Vapor Deposition) 공정에 관한 여구가 활발히 이루어지고 있다. 유도결합플라즈마는(ICP, Inductively Coupled Plasma) 정전결합플라즈마보다 플라즈마 밀도가 높고 파워전달 효율이 좋은 것으로 알려져 있으나 대면적가 어려워 기판이 큰 TFT-LCD로는 많이 연구되고 있지 않다. 본 연구는 유도결합플라즈마를 위해 내장형 multiple U-type 선형 안테나를 이용하여 나노 다결정 실리콘 박막을 증착하여 그 특성을 분석하였다.

• JSTS:Journal of Semiconductor Technology and Science
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• 제11권3호
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• pp.135-145
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• 2011

Accurate process characterization and optimization are the first step for a successful advanced process control (APC), and they should be followed by continuous monitoring and control in order to run manufacturing processes most efficiently. In this paper, process characterization and recipe optimization methods with multiple outputs are presented in high density plasma-chemical vapor deposition (HDP-CVD) silicon dioxide deposition process. Five controllable process variables of Top $SiH_4$, Bottom $SiH_4$, $O_2$, Top RF Power, and Bottom RF Power, and two responses of interest, such as deposition rate and uniformity, are simultaneously considered employing both statistical response surface methodology (RSM) and neural networks (NNs) based genetic algorithm (GA). Statistically, two phases of experimental design was performed, and the established statistical models were optimized using performance index (PI). Artificial intelligently, NN process model with two outputs were established, and recipe synthesis was performed employing GA. Statistical RSM offers minimum numbers of experiment to build regression models and response surface models, but the analysis of the data need to satisfy underlying assumption and statistical data analysis capability. NN based-GA does not require any underlying assumption for data modeling; however, the selection of the input data for the model establishment is important for accurate model construction. Both statistical and artificial intelligent methods suggest competitive characterization and optimization results in HDP-CVD $SiO_2$ deposition process, and the NN based-GA method showed 26% uniformity improvement with 36% less $SiH_4$ gas usage yielding 20.8 ${\AA}/sec$ deposition rate.

• 한국환경보건학회지
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• 제31권4호
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• pp.260-265
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• 2005

Indoor air quality might be affected by source strength of indoor pollutants, ventilation rate, decay rate, outdoor level, and so on. Although technologies measuring these factors exist directly, direct measurements of all factors are not always practical in most field studies. The purpose of this study was to develop an alternative method to estimate the source strength and deposition constant by application of multiple measurements. For the total duration of 60 days, indoor and outdoor $NO_2$ concentrations every 3 days were measured in 30 houses in Seoul, Asan and Daegu. Using a compartment model by mass balance and linear regression analysis, penetration factor (ventilation divided by sum of air exchange rate and deposition constant) and source strength factor (emission rate divided by sum of air exchange rate and deposition constant) were calculated. Subsequently, the source strength and deposition constant were estimated. Natural ventilation was $1.80{\pm}0.42\;ACH,\;1.11{\pm}0.50\;ACH,\;0.92{\pm}0.26\;ACH$ in Seoul, Asan and Daegu, respectively. Calculated deposition constant(K) and source strength of $NO_2,$ in this study were $0.98{\pm}0.28\;hr^{1}\;and\;16.28{\pm}7.47\;ppb/h,$ respectively.

• 한국표면공학회:학술대회논문집
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• 한국표면공학회 2014년도 추계학술대회 논문집
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• pp.273-273
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• 2014

Quantum-dot sensitized solar cells (QDSCs) are an emerging class of solar cells owing to their easy fabrication, low cost and material diversity. Despite of the fact that the maximum conversion efficiency of QDSCs is still far less than that of Dye-Sensitized Solar Cells (>12 %), their unique characteristics like Multiple Exciton Generation (MEG), energy band tune-ability and tendency to incorporate multiple co-sensitizers concurrently has made QDs a suitable alternative to expensive dyes for solar cell application. Lead Sulfide (PbS) Quantum dot sensitized solar cells are theoretically proficient enough to have a photo-current density ($J_{sc}$) of $36mA/cm^2$, but practically there are very few reports on photocurrent enhancement in PbS QDSCs. Recently, $Hg^{2+}$ incorporated PbS quantumdots and Cadmium Sulfide (CdS) co-sensitized PbS solarcells are reported to show an improvement in photo-current density ($J_{sc}$). In this study, we explored the efficacy of $In_2S_3$ as an interfacial layer deposited through SILAR process for PbS QDSCs. $In_2S_3$ was chosen as the interfacial layer in order to avoid the usage of hazardous CdS or Mercury (Hg). Herein, the deposition of $In_2S_3$ interfacial layer on $TiO_2$ prior to PbS QDs exhibited a direct enhancement in the photo-current (Isc). Improved photo-absorption as well as interfacial recombination barrier caused by $In_2S_3$ deposition increased the photo-current density ($J_{sc}$) from $13mA/cm^2$ to $15.5mA/cm^2$ for single cycle of $In_2S_3$ deposition. Increase in the number of cycles of $In_2S_3$ deposition was found to deteriorate the photocurrent, however it increased $V_{oc}$ of the device which reached to an optimum value of 2.25% Photo-conversion Efficiency (PCE) for 2 cycles of $In_2S_3$ deposition. Effect of Heat Treatment, Normalized Current Stability, Open Circuit Voltage Decay and Dark IV Characteristics were further measured to reveal the characteristics of device.