반도체디스플레이기술학회지 (Journal of the Semiconductor & Display Technology)

한국반도체디스플레이기술학회 (The Korean Society Of Semiconductor & Display Technology)
권호 표지

일체형 분광편광간섭모듈 기반 분광타원편광계의 정확도 향상

Accuracy Enhancement of Dynamic Spectroscopic Polarimetry

  • Gukhyeon Hwang (Department of Mechanical System Engineering, Jeonbuk National University) ;
  • Junbo Shim (Department of Mechanical System Engineering, Jeonbuk National University) ;
  • Inho Choi (Department of Mechanical System Engineering, Jeonbuk National University) ;
  • Sukhyun Choi (Department of Mechanical System Engineering, Jeonbuk National University) ;
  • Saeid Kheiryzadehkhanghah (Department of Mechanical System Engineering, Jeonbuk National University) ;
  • Daesuk Kim (Department of Mechanical System Engineering, Jeonbuk National University)
  • 투고 : 2023.08.24
  • 심사 : 2023.09.12
  • 발행 : 2023.09.30
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초록

We describe an optimal alignment method for improving accuracy of dynamic spectroscopic polarimeter based on monolithic polarizing interferometer. The dynamic spectroscopic polarimeter enables real-time measurements of spectral ellipsometric parameters by using a spectral carrier frequency concept. However, the non-polarizing beam splitter used in the monolithic polarizing interferometer cannot maintain the polarization state perfectly due to phase retardation caused by optical anisotropic characteristics of the non-polarizing beam splitter, resulting in degraded measurement accuracy. The effect of the beam splitter can be minimized through optimal alignment of the polarizers used in the polarizing interferometer and the analyzer. We demonstrate how much the proposed alignment method can enhance the measurement accuracy by comparing with previous alignment approach.

키워드

과제정보

This work was supported by the National Research Foundation of Korea (NRF) grant funded by the Korean government (MSIP) (2022R1I1A3071810).

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