• 반도체디스플레이기술학회지
• /
• 제22권3호
• /
• pp.90-95
• /
• 2023

We describe an optimal alignment method for improving accuracy of dynamic spectroscopic polarimeter based on monolithic polarizing interferometer. The dynamic spectroscopic polarimeter enables real-time measurements of spectral ellipsometric parameters by using a spectral carrier frequency concept. However, the non-polarizing beam splitter used in the monolithic polarizing interferometer cannot maintain the polarization state perfectly due to phase retardation caused by optical anisotropic characteristics of the non-polarizing beam splitter, resulting in degraded measurement accuracy. The effect of the beam splitter can be minimized through optimal alignment of the polarizers used in the polarizing interferometer and the analyzer. We demonstrate how much the proposed alignment method can enhance the measurement accuracy by comparing with previous alignment approach.