Journal of the Korea Organic Resources Recycling Association (유기물자원화)

Korea Organic Resources Recycling Association (유기성자원학회)
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Application of Silicon Sludge from Semiconductor Manufacturing Process as Pigments and Paints through Titanium Dioxide Coating

반도체 제조공정에서 발생하는 실리콘 슬러지의 이산화티타늄 코팅을 통한 안료 및 도료 소재로의 응용

  • Yeon-Ryong Chu (Department of Chemical and Biological Engineering, Hanbat National University) ;
  • Minki Sa (Department of Chemical and Biological Engineering, Hanbat National University) ;
  • Jiwon Kim (Department of Chemical and Biological Engineering, Hanbat National University) ;
  • Suk Jekal (Department of Chemical and Biological Engineering, Hanbat National University) ;
  • Chan-Gyo Kim (Department of Chemical and Biological Engineering, Hanbat National University) ;
  • Ha-Yeong Kim (Department of Chemical and Biological Engineering, Hanbat National University) ;
  • Song Lee (Department of Creative Convergence Engineering, Hanbat National University) ;
  • Hyung Sub Sim (Department of Aerospace Engineering, Sejong University) ;
  • Chang-Min Yoon (Department of Chemical and Biological Engineering, Hanbat National University)
  • 추연룡 (한밭대학교 화학생명공학과) ;
  • 사민기 (한밭대학교 화학생명공학과) ;
  • 김지원 (한밭대학교 화학생명공학과) ;
  • 제갈석 (한밭대학교 화학생명공학과) ;
  • 김찬교 (한밭대학교 화학생명공학과) ;
  • 김하영 (한밭대학교 화학생명공학과) ;
  • 이송 (한밭대학교 창의융합학과) ;
  • 심형섭 (세종대학교 항공우주공학과) ;
  • 윤창민 (한밭대학교 화학생명공학과)
  • Received : 2023.08.07
  • Accepted : 2023.08.14
  • Published : 2023.09.30
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Abstract

In this study, silicon sludge generated in semiconductor manufacturing process is recycled and applied as materials for pigments and paints. In detail, metallic impurities are removed from silicon sludge to obtain plate-like silicon sludge powder (SW-sludge), which is then coated with titanium dioxide via sol-gel method (TCS-sludge). SW-sludge and TCS-sludge are dispersed in hydrophilic transparent varnish and sprayed onto glass substrates to observe the possibility for the application as materials for pigments and paints. Notably, the applicability of TCS-sludge-based paint is improved compared to SW-sludge-based paint after the titanium dioxide coating. Moreover, the color of TCS-sludge-based paint turns into white. Accordingly, it is confirmed that the applicability and hydrophilicity are improved by the presence of outer titanium dioxide layer. In this regard, it is expected that the recycled TCS-sludge may be a future material for the application as pigments and paints.

본 연구에서는 반도체 제조공정에서 발생하는 실리콘 슬러지에 금속산화물인 이산화티타늄을 코팅하였으며, 이를 안료 및 도료의 소재로 응용하였다. 상세히는, 불순물이 제거된 판상형의 실리콘 슬러지 분말에 졸-겔법을 통해 이산화티타늄을 코팅하였다. 안료 및 도료의 소재로서 응용 가능성을 확인하기 위해서 친수성 투명 코팅제에 분산하여 페인트를 제조한 후 유리 기판에 분사하였다. 그 결과, 이산화티타늄의 도입으로 인한 발림성 향상과 하얀색의 발현을 확인할 수 있었다. 본 연구를 통해서 실리콘 슬러지에 이산화티타늄을 코팅함으로써 발림성 및 친수성이 향상됨을 확인하였으며, 이를 통해서 반도체 공정에서 발생하는 실리콘 슬러지가 안료 및 도료의 소재로서 응용 가능성을 확인하였다.

Keywords

Acknowledgement

본 연구는 2023년도 정부(과학기술정보통신부)의 재원으로 한국연구재단의 지원을 받아 수행된 연구임(No. 2022R1F1A1061032).

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