Journal of the Korea Organic Resources Recycling Association (유기물자원화)

Korea Organic Resources Recycling Association (유기성자원학회)
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A Comparative Study on Morphologies and Characteristics of Silica Nanoparticles Recycled from Silicon Sludge Waste of Semiconductor Process Based on Synthesis Methods

반도체 공정에서 발생하는 폐실리콘 슬러지의 재활용을 통한 실리카 나노입자의 제조 및 합성법에 따른 형상 및 특성 비교 연구

  • Jiwon Kim (Department of Chemical and Biological Engineering, Hanbat National University) ;
  • Minki Sa (Department of Chemical and Biological Engineering, Hanbat National University) ;
  • Yeon-Ryong Chu (Department of Chemical and Biological Engineering, Hanbat National University) ;
  • Suk Jekal (Department of Chemical and Biological Engineering, Hanbat National University) ;
  • Ha-Yeong Kim (Department of Chemical and Biological Engineering, Hanbat National University) ;
  • Chan-Gyo Kim (Department of Chemical and Biological Engineering, Hanbat National University) ;
  • Hyung Sub Sim (Department of Aerospace Engineering, Sejong University) ;
  • Chang-Min Yoon (Department of Chemical and Biological Engineering, Hanbat National University)
  • 김지원 (한밭대학교 화학생명공학과) ;
  • 사민기 (한밭대학교 화학생명공학과) ;
  • 추연룡 (한밭대학교 화학생명공학과) ;
  • 제갈석 (한밭대학교 화학생명공학과) ;
  • 김하영 (한밭대학교 화학생명공학과) ;
  • 김찬교 (한밭대학교 화학생명공학과) ;
  • 심형섭 (세종대학교 항공우주공학과) ;
  • 윤창민 (한밭대학교 화학생명공학과)
  • Received : 2023.07.27
  • Accepted : 2023.08.11
  • Published : 2023.09.30
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Abstract

In this study, a comparative study is conducted on the synthesis methods for silica nanoparticle employing the silicon sludge waste generated from the semiconductor manufacturing processes. Specifically, acid-washed silicon sludge wastes with no impurities are employed as the precursors of sol-gel and hydrothermal methods for silica nanoparticles preparation. The morphologies and properties of silica nanoparticles synthesized via two synthetic methods are examined by various analysis methods. As a result, silica nanoparticles from the sol-gel method are fabricated with high purity and uniform shape, while the hydrothermal method exhibits advantages in yield and ease of synthetic process. This comparative study offers detailed experimental results on the two synthetic methods for silica nanoparticle synthesis, which may contribute to the establishment of manufacturing high-value materials using the by-products generated in the semiconductor process.

본 연구에서는 반도체 공정에서 발생하는 폐실리콘 슬러지를 활용하여 고부가가치의 실리카 나노입자로 합성하는 방법들에 대한 비교 연구를 수행하였다. 상세히는, 폐실리콘 슬러지 내에 존재하는 금속과 유기 불순물을 산세 처리를 통해 제거한 뒤 졸-겔법과 수열합성법을 통해 실리카 나노입자로 제조하였다. 두 가지 합성법을 통해 제조된 실리카 나노입자에 대한 다양한 형상 및 특성 분석을 진행하였다. 그 결과, 졸-겔법으로 제조된 실리카 나노입자는 순도가 높고 균일한 형상으로 합성되었으며, 수열합성법은 수율과 단순한 제조법의 이점을 확인할 수 있었다. 본 비교 연구는 폐실리콘 슬러지에서 실리카 나노입자를 제조하는 두 가지 합성법에 대한 상세한 실험 결과를 제시하여, 반도체 공정에서 발생하는 부산물을 활용한 고부가가치 소재 제조법 정립에 기여할 것으로 기대된다.

Keywords

Acknowledgement

본 연구는 2023년도 중소벤처기업부의 기술개발사업 지원에 의한 연구임(RS-2023-00224896)

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