반도체디스플레이기술학회지 (Journal of the Semiconductor & Display Technology)

한국반도체디스플레이기술학회 (The Korean Society Of Semiconductor & Display Technology)
권호 표지

공기중 미세입자 측정 데이터 분석 및 통계 유의차 분석

Airborne Fine Particle Measurement Data Analysis and Statistical Significance Analysis

  • 안성준 (제주한라대학교 인공지능공학과) ;
  • 문석환 (제주한라대학교 인공지능공학과)
  • Sung Jun An (Department of Artificial Intelligence Engineering, Cheju Halla University) ;
  • Moon Suk Hwan (Department of Artificial Intelligence Engineering, Cheju Halla University)
  • 투고 : 2023.01.25
  • 심사 : 2023.03.20
  • 발행 : 2023.03.31
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초록

Most of the production process is performed in a cleanroom in the case of facilities that produce semiconductor chips or display panels. Therefore, environmental management of cleanrooms is very important for product yield and quality control. Among them, airborne particles are a representative management item enough to be the standard for the actual cleanroom rating, and it is a part of the Fab or Facility monitoring system, and the sequential particle monitoring system is mainly used. However, this method has a problem in that measurement efficiency decreases as the length of the sampling tube increases. In addition, a statistically significant test of deterioration in efficiency has rarely been performed. Therefore, in this study, the statistically significant test between the number of particles measured by InSitu and the number of particles measured for each sampling tube ends(Remote). Through this, the efficiency degradation problem of the sequential particle monitoring system was confirmed by a statistical method.

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참고문헌

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