Current Optics and Photonics

Optical Society of Korea (한국광학회)
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Multilayered High-directional Waveguide Grating Antenna Based on Interleaved Etching for Optical Phased Arrays

  • Yang Bo (State Key Laboratory of Functional Materials for Informatics, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences) ;
  • Qing Wang (Shanghai Industrial muTechnology Research Institute) ;
  • Jinyu Wang (State Key Laboratory of Functional Materials for Informatics, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences) ;
  • Yan, Cai (State Key Laboratory of Functional Materials for Informatics, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences) ;
  • Wencheng Yue (State Key Laboratory of Functional Materials for Informatics, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences) ;
  • Shuxiao Wang (State Key Laboratory of Functional Materials for Informatics, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences) ;
  • Wei Wang (Shanghai Industrial muTechnology Research Institute) ;
  • Mingbin Yu (Shanghai Industrial muTechnology Research Institute)
  • Received : 2022.12.01
  • Accepted : 2023.01.17
  • Published : 2023.04.25
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Abstract

We propose a highly directional waveguide grating antenna for an optical phased array, achieving high directionality of more than 97% by interleaving the trenches with different etching depths in the silicon nitride layer, and adopting a multilayered structure. Meanwhile, the multilayered structure reduces the perturbation strength, which enables a centimeter-scale radiation length. The beam-steering range is 13.2°, with a wavelength bandwidth of 100 nm. The 1-dB bandwidth of the grating is 305 nm. The multilayered grating structure has a large tolerance to the fabrication variation and is compatible with CMOS fabrication techniques.

Keywords

Acknowledgement

Key Project of National Natural Science Foundation of China (61935003); the Strategic Pioneer Research Projects of Defense Science and Technology (XDB43020500); and the Shanghai Sailing Program (20YF1456900).

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