한국기계가공학회지 (Journal of the Korean Society of Manufacturing Process Engineers)

  • 제21권9호
  • /
  • Pages.1-11
  • /
  • 2022
  • /
  • 1598-6721(pISSN)
  • /
  • 2288-0771(eISSN)
한국기계가공학회 (The Korean Society of Manufacturing Process Engineers)
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세라믹 소재 초음파 드릴링 가공을 위한 초음파 Horn의 최적 설계에 관한 연구

Optimal Design of Ultrasonic Horn for Ultrasonic Drilling Processing of Ceramic Material

  • 차승환 (금오공과대학교 기계공학과) ;
  • 양동호 (금오공과대학교 기계공학과) ;
  • 이상협 (금오공과대학교 기계공학과) ;
  • 이종찬 (금오공과대학교 기계공학과)
  • 투고 : 2022.07.12
  • 심사 : 2022.08.17
  • 발행 : 2022.09.30
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초록

Recently, there has been continuous technological development in the semiconductor industry, and semiconductor manufacturing technologies are being advanced and highly integrated. For this reason, ceramic material having excellent heat resistance, wear resistance, and conductivity are used as components in semiconductor manufacturing. Among them, the probe card's space transformer is used as ceramic material to prevent electronic signal noise during the electrical die sorting of semiconductor function testing. However, implementing a bulk-type space transformer with a thickness of 5.6 mm or more is challenging, and thus it is produced in a structure with a stacked ceramic film. The stacked space transformer has low productivity because it is difficult to ensure hole clogging and a precise shape. In this research, an ultrasonic horn is designed to manufacture a bulk-type ceramic space transformer through ultrasonic drilling. Vibration characteristics were analyzed according to the ultrasonic horn, and the natural frequency was measured.

키워드

과제정보

본 연구는 금오공과대학교 학술연구비를 지원받아 수행되었습니다. 관계자 여러분께 감사드립니다.

참고문헌

  1. Jang, S. H., Lee, S. W., Choi, H. Z. and Lee, S. K., "The Geometric Machining Mechanism of Ultrasonic Drilling", Journal of the Korean Society for Precision Engineering, Vol. 22 No. 4, pp. 76-83, 2005.
  2. Jang, H. S., Park, Y. W. and Park, D. S., "Design and Weldability Verification of the 40kHz Horn for Ultrasonic Metal Welding", Journal of the Korean Society of Manufacturing Process Engineers, Vol. 12, No. 2, pp. 55-60, 2013.
  3. Choi, S. J., Kim, J. S., Shin, J. H. and Youn, J. W., Evaluation of the Machinability of Diamond Drills for High-hardness Ceramics, Journal of the Korean Society of Manufacturing Technology Engineers, Vol. 28, No. 2, pp. 79-85, 2019. https://doi.org/10.7735/ksmte.2019.28.2.79
  4. Kang, J. P., "Study on the Design of Ultrasonic Vibration Cutting Tool Horn, Journal of the Korean Society for Precision Engineering, Vol. 8, No. 3, pp. 55-63, 1991.
  5. Kim, J. S., Kim, J. W., Kim, I. J. and Seo, J. W., Analysis of Optimum Design of Stepped Bar Horn for 20kHz Metal Ultrasonic Welding, Journal of the Korea Academia-Industrial cooperation Society, Vol. 20 No. 3, pp. 94-101, 2019. https://doi.org/10.5762/KAIS.2019.20.12.94
  6. Kim, Y. W., Yim, V., Han, D. W. and Lee, S. Y. Vibration Characteristics of a Wire-Bonding Ultrasonic Horn, Transactions of the Korean Society of Mechanical Engineers A, Vol. 38 No. 2, pp. - 227-233, 2014. https://doi.org/10.3795/KSME-A.2014.38.2.227
  7. Seo, J. S., Kim, J. W. and Park, D. S., Design Improvement and Performance Evaluation of 20kHz Horn for Ultrasonic Cutting, Journal of the Korean Society of Manufacturing Process Engineers, Vol. 12, No. 5, pp. 135-140, 2013.