반도체디스플레이기술학회지 (Journal of the Semiconductor & Display Technology)

한국반도체디스플레이기술학회 (The Korean Society Of Semiconductor & Display Technology)
권호 표지

스프레이 공정을 이용한 nc-ZnO/ZnO 전계효과트랜지스터 제작 및 특성 분석

The Study of nc-ZnO/ZnO Field-effect Transistors Fabricated by Spray-pyrolysis Process

  • 조준희 (상명대학교 전자공학과)
  • Cho, Junhee (Department of Electronics Engineering, Sangmyung University)
  • 투고 : 2022.08.03
  • 심사 : 2022.09.19
  • 발행 : 2022.09.30
PDF 다운로드
⟨ 이전 논문 다음 논문 ⟩

초록

Metal oxide semiconductor (MOS) based on spray-pyrolysis deposition technique has attracted large attention due to simple and low-cost processibility while preserving their intrinsic optical and electrical characteristics. However, their high process temperature limits practical applications. Here, we demonstrated the nc-ZnO/ZnO field-effect transistors (FETs) via spray-pyrolysis as incorporating ZnO nanocrystalline nanoparticles into typical ZnO precursor. The nc-ZnO/ZnO FETs exhibit good quality of electrical properties. Our experiments reveal that nc-ZnO in active layer enhance electrical characteristics.

키워드

과제정보

본 연구는 2022학년도 상명대학교 교내연구비를 지원 받아 수행하였음 (과제번호: 2022-A000-0326).

참고문헌

  1. K. Nomura, H. Ohta, A. Takagi, T. Kamiya, M. Hirano and H. Hosono, "Room-temperature fabrication of transparent flexible thin-film transistors using amorphous oxide semiconductors," Nature, vol. 432, pp. 488-492, Nov. 2004. https://doi.org/10.1038/nature03090
  2. I. Seo, and S. Ryu, "Structural and Electrical Properties of Aluminum Doped ZnO Electrodes Prepared by Atomic Layer Deposition for Application in Organic Solar Cells," Journal of the Semiconductor & Display Technology, Vol. 13, No. 2, pp.1-6, 2014.
  3. A. Kolodziejczak-Radzimska and T. Jesionowski, "Zinc Oxide-From Synthesis to Application: A Review," Materials, vol. 7, no. 4, pp. 2833-2881, Apr. 2014. https://doi.org/10.3390/ma7042833
  4. W.-H. Lee, W.-T. Jang, J.-S. Kim and S.-N. Lee, "Top-emission Electroluminescent Devices based on Gadoped ZnO Electrodes," Journal of the Semiconductor & Display Technology, Vol. 16, No. 2, pp.44-48, 2017.
  5. M. Yu and J. Jo, "Sputtering Growth of ZnO Thin-Film Transistor Using Zn Target," Journal of the Semiconductor & Display Technology, Vol. 13, No. 3, pp.35-38, 2014.
  6. D. Yoo, H. Kim, J. Kim and J. Jo, "Current Variation in ZnO Thin-Film Transistor under Different Annealing Conditions," Journal of the Semiconductor & Display Technology, Vol. 13, No. 1, pp.63-66, 2014.
  7. D. Afouxenidis, R. Mazzocco, G. Vourlias, P.J. Livesley, A. Krier, W.I. Milne, O. Kolosov and G. Adamopoulos, "ZnO-based Thin Film Transistors Employing Aluminum Titanate Gate Dielectric Deposited by Spray Pyrolysis at Ambient Air," ACS Appl. Mater. Interfaces vol.7, Issue 13, pp.7334-7341, Apr. 2015. https://doi.org/10.1021/acsami.5b00561
  8. Y.-Y. Noh, X. Cheng, H. Sirringhaus, J. I. Sohn, M. E. Welland, and D. J. Kang, "Ink-jet printed ZnO nanowire field effect transistors," Appl. Phys. Lett., vol. 91, no. 4, p. 043109, Jul. 2007. https://doi.org/10.1063/1.2760041
  9. J. Cho, "Morphological and Electrical Characteristics of nc-ZnO/ZnO Thin Film Fabricated by Spray-pyrolysis for Field-effect Transistor Application," Journal of the Semiconductor & Display Technology, Vol. 20, No. 4, pp.1-5, 2014.