한국산업보건학회지 (Journal of Korean Society of Occupational and Environmental Hygiene)

  • 제32권2호
  • /
  • Pages.111-115
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  • 2022
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  • 2384-132X(pISSN)
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  • 2289-0564(eISSN)
한국산업보건학회 (Korean Industrial Hygiene Association)
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반도체 FAB의 비말에 의한 감염병 전파 가능성 연구

Possibility of Spreading Infectious Diseases by Droplets Generated from Semiconductor Fabrication Process

  • 오건환 (서울과학기술대학교 융합과학대학원) ;
  • 김기연 (서울과학기술대학교 융합과학대학원)
  • Oh, Kun-Hwan (Graduate School of Convergence Science, Seoul National University of Science and Technology) ;
  • Kim, Ki-Youn (Graduate School of Convergence Science, Seoul National University of Science and Technology)
  • 투고 : 2022.02.18
  • 심사 : 2022.05.29
  • 발행 : 2022.06.30
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초록

Objectives: The purpose of this study is to verify whether droplet-induced propagation, the main route of infectious diseases such as COVID-19, can occur in semiconductor FAB (Fabrication), based on research results on general droplet propagation. Methods: Through data surveys droplet propagation was modeled through simulation and experimental case analysis according to general (without mask) and mask-wearing conditions, and the risk of droplet propagation was inferred by reflecting semiconductor FAB operation conditions (air current, air conditioning system, humidity, filter conditions). Results: Based on the results investigated to predict the possibility of spreading infectious diseases in semiconductor FAB, the total amount of droplet propagation (concentration), propagation distance, and virus life in FAB were inferred by reflecting the management parameter of semiconductor FAB. Conclusions: The total amount(concentration) of droplet propagation in the semiconductor fab is most affected by the presence or absence of wearing a mask and the line air dilution rate has some influence. when worn it spreads within 0.35~1m, and since the humidity is constant the virus can survive in the air for up to 3 hours. as a result the semiconductor fab is judged to be and effective space to block virus propagation due to the special environmental condition of a clean room.

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과제정보

이 논문은 2020년도 정부(교육부)의 재원으로 한국연구재단의 지원을 받아 수행된 기초연구 사업임(NRF-2020R1A6A1A03042742).

참고문헌

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